8/2/2012	10:12:28 AM	Recipe started at 10:12 AM
8/2/2012	10:12:28 AM	Helium valve closed
8/2/2012	10:12:28 AM	H2 valve closed
8/2/2012	10:12:28 AM	BCl3 valve closed
8/2/2012	10:12:28 AM	PH3 valve closed
8/2/2012	10:12:28 AM	SiCl4 pre valve closed
8/2/2012	10:12:28 AM	SiCl4 post valve closed
8/2/2012	10:12:28 AM	Main Vac valve closed
8/2/2012	10:12:28 AM	Bypass valve closed
8/2/2012	10:12:28 AM	Bubbler valve closed
8/2/2012	10:12:28 AM	Helium MFC set to  0.000000
8/2/2012	10:12:28 AM	H2 MFC set to  0.000000
8/2/2012	10:12:28 AM	BCl3 MFC set to  0.000000
8/2/2012	10:12:28 AM	PH3 MFC set to  0.000000
8/2/2012	10:12:28 AM	SiCl4 MFC set to  0.000000
8/2/2012	10:12:28 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	10:12:28 AM	Tube furnace set to 0
8/2/2012	10:12:31 AM	Helium valve closed
8/2/2012	10:12:31 AM	BCl3 valve closed
8/2/2012	10:12:31 AM	PH3 valve closed
8/2/2012	10:12:31 AM	SiCl4 pre valve closed
8/2/2012	10:12:31 AM	SiCl4 post valve closed
8/2/2012	10:12:31 AM	Main Vac valve closed
8/2/2012	10:12:31 AM	Bypass valve closed
8/2/2012	10:12:31 AM	Bubbler valve closed
8/2/2012	10:12:31 AM	H2 valve opened
8/2/2012	10:12:31 AM	Helium MFC set to  0.000000
8/2/2012	10:12:31 AM	H2 MFC set to  500.000000
8/2/2012	10:12:31 AM	BCl3 MFC set to  0.000000
8/2/2012	10:12:31 AM	PH3 MFC set to  0.000000
8/2/2012	10:12:31 AM	SiCl4 MFC set to  0.000000
8/2/2012	10:12:31 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	10:12:31 AM	Tube furnace set to 0
8/2/2012	10:13:43 AM	Helium valve closed
8/2/2012	10:13:43 AM	BCl3 valve closed
8/2/2012	10:13:43 AM	PH3 valve closed
8/2/2012	10:13:43 AM	SiCl4 pre valve closed
8/2/2012	10:13:43 AM	SiCl4 post valve closed
8/2/2012	10:13:43 AM	Main Vac valve closed
8/2/2012	10:13:43 AM	Bypass valve closed
8/2/2012	10:13:43 AM	H2 valve opened
8/2/2012	10:13:43 AM	Bubbler valve opened
8/2/2012	10:13:43 AM	Helium MFC set to  0.000000
8/2/2012	10:13:43 AM	H2 MFC set to  500.000000
8/2/2012	10:13:43 AM	BCl3 MFC set to  0.000000
8/2/2012	10:13:43 AM	PH3 MFC set to  0.000000
8/2/2012	10:13:43 AM	SiCl4 MFC set to  0.000000
8/2/2012	10:13:43 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	10:13:43 AM	Tube furnace set to 0
8/2/2012	10:13:44 AM	Helium valve closed
8/2/2012	10:13:44 AM	BCl3 valve closed
8/2/2012	10:13:44 AM	PH3 valve closed
8/2/2012	10:13:44 AM	SiCl4 pre valve closed
8/2/2012	10:13:44 AM	SiCl4 post valve closed
8/2/2012	10:13:44 AM	Main Vac valve closed
8/2/2012	10:13:44 AM	Bypass valve closed
8/2/2012	10:13:44 AM	H2 valve opened
8/2/2012	10:13:44 AM	Bubbler valve opened
8/2/2012	10:13:44 AM	Helium MFC set to  0.000000
8/2/2012	10:13:44 AM	H2 MFC set to  500.000000
8/2/2012	10:13:44 AM	BCl3 MFC set to  0.000000
8/2/2012	10:13:44 AM	PH3 MFC set to  0.000000
8/2/2012	10:13:44 AM	SiCl4 MFC set to  0.000000
8/2/2012	10:13:44 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	10:13:45 AM	Tube furnace set to 1000
8/2/2012	10:33:45 AM	Helium valve closed
8/2/2012	10:33:45 AM	BCl3 valve closed
8/2/2012	10:33:45 AM	Main Vac valve closed
8/2/2012	10:33:45 AM	Bypass valve closed
8/2/2012	10:33:45 AM	H2 valve opened
8/2/2012	10:33:45 AM	PH3 valve opened
8/2/2012	10:33:45 AM	SiCl4 pre valve opened
8/2/2012	10:33:45 AM	SiCl4 post valve opened
8/2/2012	10:33:45 AM	Bubbler valve opened
8/2/2012	10:33:45 AM	Helium MFC set to  0.000000
8/2/2012	10:33:45 AM	H2 MFC set to  500.000000
8/2/2012	10:33:45 AM	BCl3 MFC set to  0.000000
8/2/2012	10:33:45 AM	PH3 MFC set to  0.300000
8/2/2012	10:33:45 AM	SiCl4 MFC set to  25.000000
8/2/2012	10:33:45 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	10:33:45 AM	Tube furnace set to 1000
8/2/2012	10:45:45 AM	Helium valve closed
8/2/2012	10:45:45 AM	BCl3 valve closed
8/2/2012	10:45:45 AM	PH3 valve closed
8/2/2012	10:45:45 AM	SiCl4 pre valve closed
8/2/2012	10:45:45 AM	SiCl4 post valve closed
8/2/2012	10:45:45 AM	Main Vac valve closed
8/2/2012	10:45:45 AM	Bypass valve closed
8/2/2012	10:45:45 AM	H2 valve opened
8/2/2012	10:45:45 AM	Bubbler valve opened
8/2/2012	10:45:45 AM	Helium MFC set to  0.000000
8/2/2012	10:45:45 AM	H2 MFC set to  500.000000
8/2/2012	10:45:45 AM	BCl3 MFC set to  0.000000
8/2/2012	10:45:45 AM	PH3 MFC set to  0.000000
8/2/2012	10:45:45 AM	SiCl4 MFC set to  0.000000
8/2/2012	10:45:45 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	10:45:45 AM	Tube furnace set to 750
8/2/2012	10:50:45 AM	H2 valve closed
8/2/2012	10:50:45 AM	BCl3 valve closed
8/2/2012	10:50:45 AM	PH3 valve closed
8/2/2012	10:50:45 AM	SiCl4 pre valve closed
8/2/2012	10:50:45 AM	SiCl4 post valve closed
8/2/2012	10:50:45 AM	Main Vac valve closed
8/2/2012	10:50:45 AM	Bypass valve closed
8/2/2012	10:50:45 AM	Helium valve opened
8/2/2012	10:50:45 AM	Bubbler valve opened
8/2/2012	10:50:45 AM	Helium MFC set to  500.000000
8/2/2012	10:50:45 AM	H2 MFC set to  0.000000
8/2/2012	10:50:45 AM	BCl3 MFC set to  0.000000
8/2/2012	10:50:45 AM	PH3 MFC set to  0.000000
8/2/2012	10:50:45 AM	SiCl4 MFC set to  0.000000
8/2/2012	10:50:45 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	10:50:45 AM	Tube furnace set to 0
8/2/2012	10:58:05 AM	Run aborted at 10:58 AM
8/2/2012	10:58:05 AM	Helium valve closed
8/2/2012	10:58:06 AM	H2 valve closed
8/2/2012	10:58:06 AM	BCl3 valve closed
8/2/2012	10:58:06 AM	PH3 valve closed
8/2/2012	10:58:06 AM	SiCl4 pre valve closed
8/2/2012	10:58:06 AM	SiCl4 post valve closed
8/2/2012	10:58:06 AM	Bypass valve closed
8/2/2012	10:58:06 AM	Main Vac valve closed
8/2/2012	10:58:06 AM	Bubbler valve closed
8/2/2012	10:58:06 AM	Helium MFC set to  0.000000
8/2/2012	10:58:06 AM	H2 MFC set to  0.000000
8/2/2012	10:58:06 AM	BCl3 MFC set to  0.000000
8/2/2012	10:58:06 AM	PH3 MFC set to  0.000000
8/2/2012	10:58:06 AM	SiCl4 MFC set to  0.000000
8/2/2012	10:58:06 AM	Tube furnace set to 0
8/2/2012	10:58:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2012	10:58:08 AM	Recipe started at 10:58 AM
8/2/2012	10:58:08 AM	Helium valve closed
8/2/2012	10:58:08 AM	H2 valve closed
8/2/2012	10:58:08 AM	BCl3 valve closed
8/2/2012	10:58:08 AM	PH3 valve closed
8/2/2012	10:58:08 AM	SiCl4 pre valve closed
8/2/2012	10:58:08 AM	SiCl4 post valve closed
8/2/2012	10:58:08 AM	Main Vac valve closed
8/2/2012	10:58:08 AM	Bypass valve closed
8/2/2012	10:58:08 AM	Bubbler valve closed
8/2/2012	10:58:08 AM	Helium MFC set to  0.000000
8/2/2012	10:58:08 AM	H2 MFC set to  0.000000
8/2/2012	10:58:08 AM	BCl3 MFC set to  0.000000
8/2/2012	10:58:08 AM	PH3 MFC set to  0.000000
8/2/2012	10:58:08 AM	SiCl4 MFC set to  0.000000
8/2/2012	10:58:08 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	10:58:08 AM	Tube furnace set to 0
8/2/2012	10:58:11 AM	H2 valve closed
8/2/2012	10:58:11 AM	BCl3 valve closed
8/2/2012	10:58:11 AM	PH3 valve closed
8/2/2012	10:58:11 AM	SiCl4 pre valve closed
8/2/2012	10:58:11 AM	SiCl4 post valve closed
8/2/2012	10:58:11 AM	Main Vac valve closed
8/2/2012	10:58:11 AM	Bypass valve closed
8/2/2012	10:58:11 AM	Bubbler valve closed
8/2/2012	10:58:11 AM	Helium valve opened
8/2/2012	10:58:11 AM	Helium MFC set to  500.000000
8/2/2012	10:58:11 AM	H2 MFC set to  0.000000
8/2/2012	10:58:11 AM	BCl3 MFC set to  0.000000
8/2/2012	10:58:11 AM	PH3 MFC set to  0.000000
8/2/2012	10:58:11 AM	SiCl4 MFC set to  0.000000
8/2/2012	10:58:11 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	10:58:11 AM	Tube furnace set to 0
8/2/2012	10:58:11 AM	Helium valve closed
8/2/2012	10:58:11 AM	H2 valve closed
8/2/2012	10:58:11 AM	BCl3 valve closed
8/2/2012	10:58:11 AM	PH3 valve closed
8/2/2012	10:58:11 AM	SiCl4 pre valve closed
8/2/2012	10:58:11 AM	SiCl4 post valve closed
8/2/2012	10:58:11 AM	Main Vac valve closed
8/2/2012	10:58:11 AM	Bypass valve closed
8/2/2012	10:58:11 AM	Bubbler valve closed
8/2/2012	10:58:11 AM	Helium MFC set to  0.000000
8/2/2012	10:58:11 AM	H2 MFC set to  0.000000
8/2/2012	10:58:11 AM	BCl3 MFC set to  0.000000
8/2/2012	10:58:11 AM	PH3 MFC set to  0.000000
8/2/2012	10:58:11 AM	SiCl4 MFC set to  0.000000
8/2/2012	10:58:11 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	10:58:12 AM	Tube furnace set to 0
8/2/2012	10:58:13 AM	Run finished at 10:58 AM
8/2/2012	10:58:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2012	10:59:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2012	10:59:56 AM	Recipe started at 10:59 AM
8/2/2012	10:59:56 AM	Helium valve closed
8/2/2012	10:59:56 AM	H2 valve closed
8/2/2012	10:59:56 AM	BCl3 valve closed
8/2/2012	10:59:56 AM	PH3 valve closed
8/2/2012	10:59:56 AM	SiCl4 pre valve closed
8/2/2012	10:59:56 AM	SiCl4 post valve closed
8/2/2012	10:59:56 AM	Main Vac valve closed
8/2/2012	10:59:56 AM	Bubbler valve closed
8/2/2012	10:59:56 AM	Bypass valve opened
8/2/2012	10:59:56 AM	Helium MFC set to  0.000000
8/2/2012	10:59:56 AM	H2 MFC set to  0.000000
8/2/2012	10:59:56 AM	BCl3 MFC set to  0.000000
8/2/2012	10:59:56 AM	PH3 MFC set to  0.000000
8/2/2012	10:59:56 AM	SiCl4 MFC set to  0.000000
8/2/2012	10:59:56 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	10:59:57 AM	Tube furnace set to 0
8/2/2012	11:00:58 AM	Helium valve closed
8/2/2012	11:00:58 AM	H2 valve closed
8/2/2012	11:00:58 AM	BCl3 valve closed
8/2/2012	11:00:58 AM	PH3 valve closed
8/2/2012	11:00:58 AM	SiCl4 pre valve closed
8/2/2012	11:00:58 AM	SiCl4 post valve closed
8/2/2012	11:00:58 AM	Main Vac valve closed
8/2/2012	11:00:58 AM	Bubbler valve closed
8/2/2012	11:00:58 AM	Bypass valve opened
8/2/2012	11:00:58 AM	Helium MFC set to  0.000000
8/2/2012	11:00:58 AM	H2 MFC set to  0.000000
8/2/2012	11:00:58 AM	BCl3 MFC set to  0.000000
8/2/2012	11:00:58 AM	PH3 MFC set to  0.000000
8/2/2012	11:00:58 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:00:58 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:00:59 AM	Tube furnace set to 0
8/2/2012	11:01:59 AM	Helium valve closed
8/2/2012	11:01:59 AM	H2 valve closed
8/2/2012	11:01:59 AM	BCl3 valve closed
8/2/2012	11:01:59 AM	PH3 valve closed
8/2/2012	11:01:59 AM	SiCl4 pre valve closed
8/2/2012	11:01:59 AM	SiCl4 post valve closed
8/2/2012	11:01:59 AM	Bypass valve closed
8/2/2012	11:01:59 AM	Bubbler valve closed
8/2/2012	11:01:59 AM	Main Vac valve opened
8/2/2012	11:01:59 AM	Helium MFC set to  0.000000
8/2/2012	11:01:59 AM	H2 MFC set to  0.000000
8/2/2012	11:01:59 AM	BCl3 MFC set to  0.000000
8/2/2012	11:01:59 AM	PH3 MFC set to  0.000000
8/2/2012	11:01:59 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:01:59 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:01:59 AM	Tube furnace set to 0
8/2/2012	11:02:00 AM	Run finished at 11:02 AM
8/2/2012	11:02:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2012	11:04:22 AM	Recipe started at 11:04 AM
8/2/2012	11:04:22 AM	Helium valve closed
8/2/2012	11:04:22 AM	H2 valve closed
8/2/2012	11:04:22 AM	BCl3 valve closed
8/2/2012	11:04:22 AM	PH3 valve closed
8/2/2012	11:04:22 AM	SiCl4 pre valve closed
8/2/2012	11:04:22 AM	SiCl4 post valve closed
8/2/2012	11:04:22 AM	Bypass valve closed
8/2/2012	11:04:22 AM	Bubbler valve closed
8/2/2012	11:04:22 AM	Main Vac valve opened
8/2/2012	11:04:22 AM	Helium MFC set to  0.000000
8/2/2012	11:04:22 AM	H2 MFC set to  0.000000
8/2/2012	11:04:22 AM	BCl3 MFC set to  0.000000
8/2/2012	11:04:22 AM	PH3 MFC set to  0.000000
8/2/2012	11:04:22 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:04:22 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:04:22 AM	Tube furnace set to 150
8/2/2012	11:04:52 AM	H2 valve closed
8/2/2012	11:04:53 AM	BCl3 valve closed
8/2/2012	11:04:53 AM	PH3 valve closed
8/2/2012	11:04:53 AM	SiCl4 pre valve closed
8/2/2012	11:04:53 AM	SiCl4 post valve closed
8/2/2012	11:04:53 AM	Bypass valve closed
8/2/2012	11:04:53 AM	Bubbler valve closed
8/2/2012	11:04:53 AM	Helium valve opened
8/2/2012	11:04:53 AM	Main Vac valve opened
8/2/2012	11:04:53 AM	Helium MFC set to  20.000000
8/2/2012	11:04:53 AM	H2 MFC set to  0.000000
8/2/2012	11:04:53 AM	BCl3 MFC set to  0.000000
8/2/2012	11:04:53 AM	PH3 MFC set to  0.000000
8/2/2012	11:04:53 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:04:53 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:04:53 AM	Tube furnace set to 150
8/2/2012	11:05:23 AM	Helium valve closed
8/2/2012	11:05:23 AM	H2 valve closed
8/2/2012	11:05:23 AM	BCl3 valve closed
8/2/2012	11:05:23 AM	PH3 valve closed
8/2/2012	11:05:23 AM	SiCl4 pre valve closed
8/2/2012	11:05:23 AM	SiCl4 post valve closed
8/2/2012	11:05:23 AM	Bypass valve closed
8/2/2012	11:05:23 AM	Bubbler valve closed
8/2/2012	11:05:23 AM	Main Vac valve opened
8/2/2012	11:05:23 AM	Helium MFC set to  0.000000
8/2/2012	11:05:23 AM	H2 MFC set to  0.000000
8/2/2012	11:05:23 AM	BCl3 MFC set to  0.000000
8/2/2012	11:05:23 AM	PH3 MFC set to  0.000000
8/2/2012	11:05:23 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:05:23 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:05:23 AM	Tube furnace set to 150
8/2/2012	11:05:53 AM	H2 valve closed
8/2/2012	11:05:53 AM	BCl3 valve closed
8/2/2012	11:05:53 AM	PH3 valve closed
8/2/2012	11:05:53 AM	SiCl4 pre valve closed
8/2/2012	11:05:53 AM	SiCl4 post valve closed
8/2/2012	11:05:53 AM	Bypass valve closed
8/2/2012	11:05:53 AM	Bubbler valve closed
8/2/2012	11:05:53 AM	Helium valve opened
8/2/2012	11:05:53 AM	Main Vac valve opened
8/2/2012	11:05:53 AM	Helium MFC set to  20.000000
8/2/2012	11:05:53 AM	H2 MFC set to  0.000000
8/2/2012	11:05:53 AM	BCl3 MFC set to  0.000000
8/2/2012	11:05:53 AM	PH3 MFC set to  0.000000
8/2/2012	11:05:53 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:05:53 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:05:53 AM	Tube furnace set to 150
8/2/2012	11:06:23 AM	Helium valve closed
8/2/2012	11:06:23 AM	H2 valve closed
8/2/2012	11:06:23 AM	BCl3 valve closed
8/2/2012	11:06:23 AM	PH3 valve closed
8/2/2012	11:06:23 AM	SiCl4 pre valve closed
8/2/2012	11:06:23 AM	SiCl4 post valve closed
8/2/2012	11:06:23 AM	Bypass valve closed
8/2/2012	11:06:23 AM	Bubbler valve closed
8/2/2012	11:06:23 AM	Main Vac valve opened
8/2/2012	11:06:23 AM	Helium MFC set to  0.000000
8/2/2012	11:06:23 AM	H2 MFC set to  0.000000
8/2/2012	11:06:23 AM	BCl3 MFC set to  0.000000
8/2/2012	11:06:23 AM	PH3 MFC set to  0.000000
8/2/2012	11:06:23 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:06:23 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:06:23 AM	Tube furnace set to 150
8/2/2012	11:06:53 AM	H2 valve closed
8/2/2012	11:06:53 AM	BCl3 valve closed
8/2/2012	11:06:53 AM	PH3 valve closed
8/2/2012	11:06:53 AM	SiCl4 pre valve closed
8/2/2012	11:06:53 AM	SiCl4 post valve closed
8/2/2012	11:06:53 AM	Bypass valve closed
8/2/2012	11:06:53 AM	Bubbler valve closed
8/2/2012	11:06:53 AM	Helium valve opened
8/2/2012	11:06:53 AM	Main Vac valve opened
8/2/2012	11:06:53 AM	Helium MFC set to  20.000000
8/2/2012	11:06:54 AM	H2 MFC set to  0.000000
8/2/2012	11:06:54 AM	BCl3 MFC set to  0.000000
8/2/2012	11:06:54 AM	PH3 MFC set to  0.000000
8/2/2012	11:06:54 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:06:54 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:06:54 AM	Tube furnace set to 150
8/2/2012	11:08:54 AM	Helium valve closed
8/2/2012	11:08:54 AM	H2 valve closed
8/2/2012	11:08:54 AM	BCl3 valve closed
8/2/2012	11:08:54 AM	PH3 valve closed
8/2/2012	11:08:54 AM	SiCl4 pre valve closed
8/2/2012	11:08:54 AM	SiCl4 post valve closed
8/2/2012	11:08:54 AM	Bypass valve closed
8/2/2012	11:08:54 AM	Bubbler valve closed
8/2/2012	11:08:54 AM	Main Vac valve opened
8/2/2012	11:08:54 AM	Helium MFC set to  0.000000
8/2/2012	11:08:54 AM	H2 MFC set to  0.000000
8/2/2012	11:08:54 AM	BCl3 MFC set to  0.000000
8/2/2012	11:08:54 AM	PH3 MFC set to  0.000000
8/2/2012	11:08:54 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:08:54 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:08:54 AM	Tube furnace set to 150
8/2/2012	11:09:24 AM	H2 valve closed
8/2/2012	11:09:24 AM	BCl3 valve closed
8/2/2012	11:09:24 AM	PH3 valve closed
8/2/2012	11:09:24 AM	SiCl4 pre valve closed
8/2/2012	11:09:24 AM	SiCl4 post valve closed
8/2/2012	11:09:24 AM	Bypass valve closed
8/2/2012	11:09:24 AM	Bubbler valve closed
8/2/2012	11:09:24 AM	Helium valve opened
8/2/2012	11:09:24 AM	Main Vac valve opened
8/2/2012	11:09:24 AM	Helium MFC set to  20.000000
8/2/2012	11:09:24 AM	H2 MFC set to  0.000000
8/2/2012	11:09:24 AM	BCl3 MFC set to  0.000000
8/2/2012	11:09:24 AM	PH3 MFC set to  0.000000
8/2/2012	11:09:24 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:09:24 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:09:24 AM	Tube furnace set to 150
8/2/2012	11:09:54 AM	Helium valve closed
8/2/2012	11:09:54 AM	H2 valve closed
8/2/2012	11:09:54 AM	BCl3 valve closed
8/2/2012	11:09:54 AM	PH3 valve closed
8/2/2012	11:09:54 AM	SiCl4 pre valve closed
8/2/2012	11:09:54 AM	SiCl4 post valve closed
8/2/2012	11:09:54 AM	Bypass valve closed
8/2/2012	11:09:54 AM	Bubbler valve closed
8/2/2012	11:09:54 AM	Main Vac valve opened
8/2/2012	11:09:54 AM	Helium MFC set to  0.000000
8/2/2012	11:09:54 AM	H2 MFC set to  0.000000
8/2/2012	11:09:54 AM	BCl3 MFC set to  0.000000
8/2/2012	11:09:54 AM	PH3 MFC set to  0.000000
8/2/2012	11:09:54 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:09:54 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:09:54 AM	Tube furnace set to 150
8/2/2012	11:10:24 AM	H2 valve closed
8/2/2012	11:10:24 AM	BCl3 valve closed
8/2/2012	11:10:24 AM	PH3 valve closed
8/2/2012	11:10:24 AM	SiCl4 pre valve closed
8/2/2012	11:10:24 AM	SiCl4 post valve closed
8/2/2012	11:10:24 AM	Bypass valve closed
8/2/2012	11:10:24 AM	Bubbler valve closed
8/2/2012	11:10:24 AM	Helium valve opened
8/2/2012	11:10:24 AM	Main Vac valve opened
8/2/2012	11:10:24 AM	Helium MFC set to  20.000000
8/2/2012	11:10:24 AM	H2 MFC set to  0.000000
8/2/2012	11:10:24 AM	BCl3 MFC set to  0.000000
8/2/2012	11:10:24 AM	PH3 MFC set to  0.000000
8/2/2012	11:10:24 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:10:24 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:10:25 AM	Tube furnace set to 150
8/2/2012	11:10:55 AM	Helium valve closed
8/2/2012	11:10:55 AM	H2 valve closed
8/2/2012	11:10:55 AM	BCl3 valve closed
8/2/2012	11:10:55 AM	PH3 valve closed
8/2/2012	11:10:55 AM	SiCl4 pre valve closed
8/2/2012	11:10:55 AM	SiCl4 post valve closed
8/2/2012	11:10:55 AM	Bypass valve closed
8/2/2012	11:10:55 AM	Bubbler valve closed
8/2/2012	11:10:55 AM	Main Vac valve opened
8/2/2012	11:10:55 AM	Helium MFC set to  0.000000
8/2/2012	11:10:55 AM	H2 MFC set to  0.000000
8/2/2012	11:10:55 AM	BCl3 MFC set to  0.000000
8/2/2012	11:10:55 AM	PH3 MFC set to  0.000000
8/2/2012	11:10:55 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:10:55 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:10:55 AM	Tube furnace set to 150
8/2/2012	11:11:25 AM	H2 valve closed
8/2/2012	11:11:25 AM	BCl3 valve closed
8/2/2012	11:11:25 AM	PH3 valve closed
8/2/2012	11:11:25 AM	SiCl4 pre valve closed
8/2/2012	11:11:25 AM	SiCl4 post valve closed
8/2/2012	11:11:25 AM	Bypass valve closed
8/2/2012	11:11:25 AM	Bubbler valve closed
8/2/2012	11:11:25 AM	Helium valve opened
8/2/2012	11:11:25 AM	Main Vac valve opened
8/2/2012	11:11:25 AM	Helium MFC set to  20.000000
8/2/2012	11:11:25 AM	H2 MFC set to  0.000000
8/2/2012	11:11:25 AM	BCl3 MFC set to  0.000000
8/2/2012	11:11:25 AM	PH3 MFC set to  0.000000
8/2/2012	11:11:25 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:11:25 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:11:25 AM	Tube furnace set to 150
8/2/2012	11:13:25 AM	Helium valve closed
8/2/2012	11:13:25 AM	H2 valve closed
8/2/2012	11:13:25 AM	BCl3 valve closed
8/2/2012	11:13:25 AM	PH3 valve closed
8/2/2012	11:13:25 AM	SiCl4 pre valve closed
8/2/2012	11:13:25 AM	SiCl4 post valve closed
8/2/2012	11:13:25 AM	Bypass valve closed
8/2/2012	11:13:25 AM	Bubbler valve closed
8/2/2012	11:13:25 AM	Main Vac valve opened
8/2/2012	11:13:25 AM	Helium MFC set to  0.000000
8/2/2012	11:13:25 AM	H2 MFC set to  0.000000
8/2/2012	11:13:25 AM	BCl3 MFC set to  0.000000
8/2/2012	11:13:25 AM	PH3 MFC set to  0.000000
8/2/2012	11:13:25 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:13:25 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:13:25 AM	Tube furnace set to 150
8/2/2012	11:13:55 AM	H2 valve closed
8/2/2012	11:13:55 AM	BCl3 valve closed
8/2/2012	11:13:55 AM	PH3 valve closed
8/2/2012	11:13:55 AM	SiCl4 pre valve closed
8/2/2012	11:13:55 AM	SiCl4 post valve closed
8/2/2012	11:13:55 AM	Bypass valve closed
8/2/2012	11:13:55 AM	Bubbler valve closed
8/2/2012	11:13:55 AM	Helium valve opened
8/2/2012	11:13:55 AM	Main Vac valve opened
8/2/2012	11:13:55 AM	Helium MFC set to  20.000000
8/2/2012	11:13:55 AM	H2 MFC set to  0.000000
8/2/2012	11:13:55 AM	BCl3 MFC set to  0.000000
8/2/2012	11:13:55 AM	PH3 MFC set to  0.000000
8/2/2012	11:13:55 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:13:55 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:13:56 AM	Tube furnace set to 150
8/2/2012	11:14:26 AM	Helium valve closed
8/2/2012	11:14:26 AM	H2 valve closed
8/2/2012	11:14:26 AM	BCl3 valve closed
8/2/2012	11:14:26 AM	PH3 valve closed
8/2/2012	11:14:26 AM	SiCl4 pre valve closed
8/2/2012	11:14:26 AM	SiCl4 post valve closed
8/2/2012	11:14:26 AM	Bypass valve closed
8/2/2012	11:14:26 AM	Bubbler valve closed
8/2/2012	11:14:26 AM	Main Vac valve opened
8/2/2012	11:14:26 AM	Helium MFC set to  0.000000
8/2/2012	11:14:26 AM	H2 MFC set to  0.000000
8/2/2012	11:14:26 AM	BCl3 MFC set to  0.000000
8/2/2012	11:14:26 AM	PH3 MFC set to  0.000000
8/2/2012	11:14:26 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:14:26 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:14:26 AM	Tube furnace set to 150
8/2/2012	11:14:56 AM	H2 valve closed
8/2/2012	11:14:56 AM	BCl3 valve closed
8/2/2012	11:14:56 AM	PH3 valve closed
8/2/2012	11:14:56 AM	SiCl4 pre valve closed
8/2/2012	11:14:56 AM	SiCl4 post valve closed
8/2/2012	11:14:56 AM	Bypass valve closed
8/2/2012	11:14:56 AM	Bubbler valve closed
8/2/2012	11:14:56 AM	Helium valve opened
8/2/2012	11:14:56 AM	Main Vac valve opened
8/2/2012	11:14:56 AM	Helium MFC set to  20.000000
8/2/2012	11:14:56 AM	H2 MFC set to  0.000000
8/2/2012	11:14:56 AM	BCl3 MFC set to  0.000000
8/2/2012	11:14:56 AM	PH3 MFC set to  0.000000
8/2/2012	11:14:56 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:14:56 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:14:56 AM	Tube furnace set to 150
8/2/2012	11:16:56 AM	Helium valve closed
8/2/2012	11:16:56 AM	H2 valve closed
8/2/2012	11:16:56 AM	BCl3 valve closed
8/2/2012	11:16:56 AM	PH3 valve closed
8/2/2012	11:16:56 AM	SiCl4 pre valve closed
8/2/2012	11:16:56 AM	SiCl4 post valve closed
8/2/2012	11:16:56 AM	Bypass valve closed
8/2/2012	11:16:56 AM	Bubbler valve closed
8/2/2012	11:16:56 AM	Main Vac valve opened
8/2/2012	11:16:56 AM	Helium MFC set to  0.000000
8/2/2012	11:16:56 AM	H2 MFC set to  0.000000
8/2/2012	11:16:56 AM	BCl3 MFC set to  0.000000
8/2/2012	11:16:56 AM	PH3 MFC set to  0.000000
8/2/2012	11:16:56 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:16:56 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:16:56 AM	Tube furnace set to 150
8/2/2012	11:17:26 AM	H2 valve closed
8/2/2012	11:17:26 AM	BCl3 valve closed
8/2/2012	11:17:26 AM	PH3 valve closed
8/2/2012	11:17:26 AM	SiCl4 pre valve closed
8/2/2012	11:17:26 AM	SiCl4 post valve closed
8/2/2012	11:17:26 AM	Bypass valve closed
8/2/2012	11:17:26 AM	Bubbler valve closed
8/2/2012	11:17:26 AM	Helium valve opened
8/2/2012	11:17:26 AM	Main Vac valve opened
8/2/2012	11:17:26 AM	Helium MFC set to  20.000000
8/2/2012	11:17:26 AM	H2 MFC set to  0.000000
8/2/2012	11:17:26 AM	BCl3 MFC set to  0.000000
8/2/2012	11:17:26 AM	PH3 MFC set to  0.000000
8/2/2012	11:17:26 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:17:26 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:17:27 AM	Tube furnace set to 150
8/2/2012	11:17:57 AM	Helium valve closed
8/2/2012	11:17:57 AM	H2 valve closed
8/2/2012	11:17:57 AM	BCl3 valve closed
8/2/2012	11:17:57 AM	PH3 valve closed
8/2/2012	11:17:57 AM	SiCl4 pre valve closed
8/2/2012	11:17:57 AM	SiCl4 post valve closed
8/2/2012	11:17:57 AM	Bypass valve closed
8/2/2012	11:17:57 AM	Bubbler valve closed
8/2/2012	11:17:57 AM	Main Vac valve opened
8/2/2012	11:17:57 AM	Helium MFC set to  0.000000
8/2/2012	11:17:57 AM	H2 MFC set to  0.000000
8/2/2012	11:17:57 AM	BCl3 MFC set to  0.000000
8/2/2012	11:17:57 AM	PH3 MFC set to  0.000000
8/2/2012	11:17:57 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:17:57 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:17:57 AM	Tube furnace set to 150
8/2/2012	11:18:27 AM	H2 valve closed
8/2/2012	11:18:27 AM	BCl3 valve closed
8/2/2012	11:18:27 AM	PH3 valve closed
8/2/2012	11:18:27 AM	SiCl4 pre valve closed
8/2/2012	11:18:27 AM	SiCl4 post valve closed
8/2/2012	11:18:27 AM	Bypass valve closed
8/2/2012	11:18:27 AM	Bubbler valve closed
8/2/2012	11:18:27 AM	Helium valve opened
8/2/2012	11:18:27 AM	Main Vac valve opened
8/2/2012	11:18:27 AM	Helium MFC set to  20.000000
8/2/2012	11:18:27 AM	H2 MFC set to  0.000000
8/2/2012	11:18:27 AM	BCl3 MFC set to  0.000000
8/2/2012	11:18:27 AM	PH3 MFC set to  0.000000
8/2/2012	11:18:27 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:18:27 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:18:27 AM	Tube furnace set to 150
8/2/2012	11:20:27 AM	Helium valve closed
8/2/2012	11:20:27 AM	H2 valve closed
8/2/2012	11:20:27 AM	BCl3 valve closed
8/2/2012	11:20:27 AM	PH3 valve closed
8/2/2012	11:20:27 AM	SiCl4 pre valve closed
8/2/2012	11:20:27 AM	SiCl4 post valve closed
8/2/2012	11:20:27 AM	Bypass valve closed
8/2/2012	11:20:27 AM	Bubbler valve closed
8/2/2012	11:20:27 AM	Main Vac valve opened
8/2/2012	11:20:27 AM	Helium MFC set to  0.000000
8/2/2012	11:20:27 AM	H2 MFC set to  0.000000
8/2/2012	11:20:27 AM	BCl3 MFC set to  0.000000
8/2/2012	11:20:27 AM	PH3 MFC set to  0.000000
8/2/2012	11:20:27 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:20:27 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:20:27 AM	Tube furnace set to 150
8/2/2012	11:20:28 AM	Run finished at 11:20 AM
8/2/2012	11:22:59 AM	Recipe started at 11:22 AM
8/2/2012	11:22:59 AM	Helium valve closed
8/2/2012	11:22:59 AM	H2 valve closed
8/2/2012	11:22:59 AM	BCl3 valve closed
8/2/2012	11:22:59 AM	PH3 valve closed
8/2/2012	11:22:59 AM	SiCl4 pre valve closed
8/2/2012	11:22:59 AM	SiCl4 post valve closed
8/2/2012	11:22:59 AM	Bypass valve closed
8/2/2012	11:22:59 AM	Bubbler valve closed
8/2/2012	11:22:59 AM	Main Vac valve opened
8/2/2012	11:22:59 AM	Helium MFC set to  0.000000
8/2/2012	11:22:59 AM	H2 MFC set to  0.000000
8/2/2012	11:22:59 AM	BCl3 MFC set to  0.000000
8/2/2012	11:22:59 AM	PH3 MFC set to  0.000000
8/2/2012	11:22:59 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:22:59 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:22:59 AM	Tube furnace set to 150
8/2/2012	11:23:29 AM	H2 valve closed
8/2/2012	11:23:29 AM	BCl3 valve closed
8/2/2012	11:23:29 AM	PH3 valve closed
8/2/2012	11:23:29 AM	SiCl4 pre valve closed
8/2/2012	11:23:29 AM	SiCl4 post valve closed
8/2/2012	11:23:29 AM	Bypass valve closed
8/2/2012	11:23:29 AM	Bubbler valve closed
8/2/2012	11:23:29 AM	Helium valve opened
8/2/2012	11:23:29 AM	Main Vac valve opened
8/2/2012	11:23:29 AM	Helium MFC set to  20.000000
8/2/2012	11:23:29 AM	H2 MFC set to  0.000000
8/2/2012	11:23:29 AM	BCl3 MFC set to  0.000000
8/2/2012	11:23:29 AM	PH3 MFC set to  0.000000
8/2/2012	11:23:29 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:23:29 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:23:29 AM	Tube furnace set to 150
8/2/2012	11:23:59 AM	Helium valve closed
8/2/2012	11:23:59 AM	H2 valve closed
8/2/2012	11:23:59 AM	BCl3 valve closed
8/2/2012	11:23:59 AM	PH3 valve closed
8/2/2012	11:23:59 AM	SiCl4 pre valve closed
8/2/2012	11:23:59 AM	SiCl4 post valve closed
8/2/2012	11:23:59 AM	Bypass valve closed
8/2/2012	11:23:59 AM	Bubbler valve closed
8/2/2012	11:23:59 AM	Main Vac valve opened
8/2/2012	11:23:59 AM	Helium MFC set to  0.000000
8/2/2012	11:23:59 AM	H2 MFC set to  0.000000
8/2/2012	11:23:59 AM	BCl3 MFC set to  0.000000
8/2/2012	11:23:59 AM	PH3 MFC set to  0.000000
8/2/2012	11:23:59 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:23:59 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:23:59 AM	Tube furnace set to 150
8/2/2012	11:24:29 AM	H2 valve closed
8/2/2012	11:24:29 AM	BCl3 valve closed
8/2/2012	11:24:29 AM	PH3 valve closed
8/2/2012	11:24:29 AM	SiCl4 pre valve closed
8/2/2012	11:24:29 AM	SiCl4 post valve closed
8/2/2012	11:24:29 AM	Bypass valve closed
8/2/2012	11:24:29 AM	Bubbler valve closed
8/2/2012	11:24:29 AM	Helium valve opened
8/2/2012	11:24:29 AM	Main Vac valve opened
8/2/2012	11:24:29 AM	Helium MFC set to  20.000000
8/2/2012	11:24:29 AM	H2 MFC set to  0.000000
8/2/2012	11:24:29 AM	BCl3 MFC set to  0.000000
8/2/2012	11:24:29 AM	PH3 MFC set to  0.000000
8/2/2012	11:24:29 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:24:30 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:24:30 AM	Tube furnace set to 150
8/2/2012	11:25:00 AM	Helium valve closed
8/2/2012	11:25:00 AM	H2 valve closed
8/2/2012	11:25:00 AM	BCl3 valve closed
8/2/2012	11:25:00 AM	PH3 valve closed
8/2/2012	11:25:00 AM	SiCl4 pre valve closed
8/2/2012	11:25:00 AM	SiCl4 post valve closed
8/2/2012	11:25:00 AM	Bypass valve closed
8/2/2012	11:25:00 AM	Bubbler valve closed
8/2/2012	11:25:00 AM	Main Vac valve opened
8/2/2012	11:25:00 AM	Helium MFC set to  0.000000
8/2/2012	11:25:00 AM	H2 MFC set to  0.000000
8/2/2012	11:25:00 AM	BCl3 MFC set to  0.000000
8/2/2012	11:25:00 AM	PH3 MFC set to  0.000000
8/2/2012	11:25:00 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:25:00 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:25:00 AM	Tube furnace set to 150
8/2/2012	11:25:30 AM	H2 valve closed
8/2/2012	11:25:30 AM	BCl3 valve closed
8/2/2012	11:25:30 AM	PH3 valve closed
8/2/2012	11:25:30 AM	SiCl4 pre valve closed
8/2/2012	11:25:30 AM	SiCl4 post valve closed
8/2/2012	11:25:30 AM	Bypass valve closed
8/2/2012	11:25:30 AM	Bubbler valve closed
8/2/2012	11:25:30 AM	Helium valve opened
8/2/2012	11:25:30 AM	Main Vac valve opened
8/2/2012	11:25:30 AM	Helium MFC set to  20.000000
8/2/2012	11:25:30 AM	H2 MFC set to  0.000000
8/2/2012	11:25:30 AM	BCl3 MFC set to  0.000000
8/2/2012	11:25:30 AM	PH3 MFC set to  0.000000
8/2/2012	11:25:30 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:25:30 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:25:30 AM	Tube furnace set to 150
8/2/2012	11:27:30 AM	Helium valve closed
8/2/2012	11:27:30 AM	H2 valve closed
8/2/2012	11:27:30 AM	BCl3 valve closed
8/2/2012	11:27:30 AM	PH3 valve closed
8/2/2012	11:27:30 AM	SiCl4 pre valve closed
8/2/2012	11:27:30 AM	SiCl4 post valve closed
8/2/2012	11:27:30 AM	Bypass valve closed
8/2/2012	11:27:30 AM	Bubbler valve closed
8/2/2012	11:27:30 AM	Main Vac valve opened
8/2/2012	11:27:30 AM	Helium MFC set to  0.000000
8/2/2012	11:27:30 AM	H2 MFC set to  0.000000
8/2/2012	11:27:30 AM	BCl3 MFC set to  0.000000
8/2/2012	11:27:30 AM	PH3 MFC set to  0.000000
8/2/2012	11:27:30 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:27:30 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:27:30 AM	Tube furnace set to 150
8/2/2012	11:28:00 AM	H2 valve closed
8/2/2012	11:28:00 AM	BCl3 valve closed
8/2/2012	11:28:00 AM	PH3 valve closed
8/2/2012	11:28:00 AM	SiCl4 pre valve closed
8/2/2012	11:28:00 AM	SiCl4 post valve closed
8/2/2012	11:28:00 AM	Bypass valve closed
8/2/2012	11:28:00 AM	Bubbler valve closed
8/2/2012	11:28:00 AM	Helium valve opened
8/2/2012	11:28:00 AM	Main Vac valve opened
8/2/2012	11:28:00 AM	Helium MFC set to  20.000000
8/2/2012	11:28:00 AM	H2 MFC set to  0.000000
8/2/2012	11:28:00 AM	BCl3 MFC set to  0.000000
8/2/2012	11:28:00 AM	PH3 MFC set to  0.000000
8/2/2012	11:28:00 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:28:00 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:28:01 AM	Tube furnace set to 150
8/2/2012	11:28:31 AM	Helium valve closed
8/2/2012	11:28:31 AM	H2 valve closed
8/2/2012	11:28:31 AM	BCl3 valve closed
8/2/2012	11:28:31 AM	PH3 valve closed
8/2/2012	11:28:31 AM	SiCl4 pre valve closed
8/2/2012	11:28:31 AM	SiCl4 post valve closed
8/2/2012	11:28:31 AM	Bypass valve closed
8/2/2012	11:28:31 AM	Bubbler valve closed
8/2/2012	11:28:31 AM	Main Vac valve opened
8/2/2012	11:28:31 AM	Helium MFC set to  0.000000
8/2/2012	11:28:31 AM	H2 MFC set to  0.000000
8/2/2012	11:28:31 AM	BCl3 MFC set to  0.000000
8/2/2012	11:28:31 AM	PH3 MFC set to  0.000000
8/2/2012	11:28:31 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:28:31 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:28:31 AM	Tube furnace set to 150
8/2/2012	11:29:01 AM	H2 valve closed
8/2/2012	11:29:01 AM	BCl3 valve closed
8/2/2012	11:29:01 AM	PH3 valve closed
8/2/2012	11:29:01 AM	SiCl4 pre valve closed
8/2/2012	11:29:01 AM	SiCl4 post valve closed
8/2/2012	11:29:01 AM	Bypass valve closed
8/2/2012	11:29:01 AM	Bubbler valve closed
8/2/2012	11:29:01 AM	Helium valve opened
8/2/2012	11:29:01 AM	Main Vac valve opened
8/2/2012	11:29:01 AM	Helium MFC set to  20.000000
8/2/2012	11:29:01 AM	H2 MFC set to  0.000000
8/2/2012	11:29:01 AM	BCl3 MFC set to  0.000000
8/2/2012	11:29:01 AM	PH3 MFC set to  0.000000
8/2/2012	11:29:01 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:29:01 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:29:01 AM	Tube furnace set to 150
8/2/2012	11:29:31 AM	Helium valve closed
8/2/2012	11:29:31 AM	H2 valve closed
8/2/2012	11:29:31 AM	BCl3 valve closed
8/2/2012	11:29:31 AM	PH3 valve closed
8/2/2012	11:29:31 AM	SiCl4 pre valve closed
8/2/2012	11:29:31 AM	SiCl4 post valve closed
8/2/2012	11:29:31 AM	Bypass valve closed
8/2/2012	11:29:31 AM	Bubbler valve closed
8/2/2012	11:29:31 AM	Main Vac valve opened
8/2/2012	11:29:31 AM	Helium MFC set to  0.000000
8/2/2012	11:29:31 AM	H2 MFC set to  0.000000
8/2/2012	11:29:31 AM	BCl3 MFC set to  0.000000
8/2/2012	11:29:31 AM	PH3 MFC set to  0.000000
8/2/2012	11:29:31 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:29:31 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:29:31 AM	Tube furnace set to 150
8/2/2012	11:30:01 AM	H2 valve closed
8/2/2012	11:30:01 AM	BCl3 valve closed
8/2/2012	11:30:01 AM	PH3 valve closed
8/2/2012	11:30:01 AM	SiCl4 pre valve closed
8/2/2012	11:30:01 AM	SiCl4 post valve closed
8/2/2012	11:30:01 AM	Bypass valve closed
8/2/2012	11:30:01 AM	Bubbler valve closed
8/2/2012	11:30:01 AM	Helium valve opened
8/2/2012	11:30:01 AM	Main Vac valve opened
8/2/2012	11:30:01 AM	Helium MFC set to  20.000000
8/2/2012	11:30:01 AM	H2 MFC set to  0.000000
8/2/2012	11:30:01 AM	BCl3 MFC set to  0.000000
8/2/2012	11:30:01 AM	PH3 MFC set to  0.000000
8/2/2012	11:30:01 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:30:01 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:30:02 AM	Tube furnace set to 150
8/2/2012	11:32:02 AM	Helium valve closed
8/2/2012	11:32:02 AM	H2 valve closed
8/2/2012	11:32:02 AM	BCl3 valve closed
8/2/2012	11:32:02 AM	PH3 valve closed
8/2/2012	11:32:02 AM	SiCl4 pre valve closed
8/2/2012	11:32:02 AM	SiCl4 post valve closed
8/2/2012	11:32:02 AM	Bypass valve closed
8/2/2012	11:32:02 AM	Bubbler valve closed
8/2/2012	11:32:02 AM	Main Vac valve opened
8/2/2012	11:32:02 AM	Helium MFC set to  0.000000
8/2/2012	11:32:02 AM	H2 MFC set to  0.000000
8/2/2012	11:32:02 AM	BCl3 MFC set to  0.000000
8/2/2012	11:32:02 AM	PH3 MFC set to  0.000000
8/2/2012	11:32:02 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:32:02 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:32:02 AM	Tube furnace set to 150
8/2/2012	11:32:32 AM	H2 valve closed
8/2/2012	11:32:32 AM	BCl3 valve closed
8/2/2012	11:32:32 AM	PH3 valve closed
8/2/2012	11:32:32 AM	SiCl4 pre valve closed
8/2/2012	11:32:32 AM	SiCl4 post valve closed
8/2/2012	11:32:32 AM	Bypass valve closed
8/2/2012	11:32:32 AM	Bubbler valve closed
8/2/2012	11:32:32 AM	Helium valve opened
8/2/2012	11:32:32 AM	Main Vac valve opened
8/2/2012	11:32:32 AM	Helium MFC set to  20.000000
8/2/2012	11:32:32 AM	H2 MFC set to  0.000000
8/2/2012	11:32:32 AM	BCl3 MFC set to  0.000000
8/2/2012	11:32:32 AM	PH3 MFC set to  0.000000
8/2/2012	11:32:32 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:32:32 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:32:32 AM	Tube furnace set to 150
8/2/2012	11:33:02 AM	Helium valve closed
8/2/2012	11:33:02 AM	H2 valve closed
8/2/2012	11:33:02 AM	BCl3 valve closed
8/2/2012	11:33:02 AM	PH3 valve closed
8/2/2012	11:33:02 AM	SiCl4 pre valve closed
8/2/2012	11:33:02 AM	SiCl4 post valve closed
8/2/2012	11:33:02 AM	Bypass valve closed
8/2/2012	11:33:02 AM	Bubbler valve closed
8/2/2012	11:33:02 AM	Main Vac valve opened
8/2/2012	11:33:02 AM	Helium MFC set to  0.000000
8/2/2012	11:33:02 AM	H2 MFC set to  0.000000
8/2/2012	11:33:02 AM	BCl3 MFC set to  0.000000
8/2/2012	11:33:02 AM	PH3 MFC set to  0.000000
8/2/2012	11:33:02 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:33:02 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:33:02 AM	Tube furnace set to 150
8/2/2012	11:33:32 AM	H2 valve closed
8/2/2012	11:33:32 AM	BCl3 valve closed
8/2/2012	11:33:32 AM	PH3 valve closed
8/2/2012	11:33:32 AM	SiCl4 pre valve closed
8/2/2012	11:33:32 AM	SiCl4 post valve closed
8/2/2012	11:33:32 AM	Bypass valve closed
8/2/2012	11:33:32 AM	Bubbler valve closed
8/2/2012	11:33:32 AM	Helium valve opened
8/2/2012	11:33:32 AM	Main Vac valve opened
8/2/2012	11:33:32 AM	Helium MFC set to  20.000000
8/2/2012	11:33:32 AM	H2 MFC set to  0.000000
8/2/2012	11:33:32 AM	BCl3 MFC set to  0.000000
8/2/2012	11:33:32 AM	PH3 MFC set to  0.000000
8/2/2012	11:33:32 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:33:32 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:33:32 AM	Tube furnace set to 150
8/2/2012	11:35:33 AM	Helium valve closed
8/2/2012	11:35:33 AM	H2 valve closed
8/2/2012	11:35:33 AM	BCl3 valve closed
8/2/2012	11:35:33 AM	PH3 valve closed
8/2/2012	11:35:33 AM	SiCl4 pre valve closed
8/2/2012	11:35:33 AM	SiCl4 post valve closed
8/2/2012	11:35:33 AM	Bypass valve closed
8/2/2012	11:35:33 AM	Bubbler valve closed
8/2/2012	11:35:33 AM	Main Vac valve opened
8/2/2012	11:35:33 AM	Helium MFC set to  0.000000
8/2/2012	11:35:33 AM	H2 MFC set to  0.000000
8/2/2012	11:35:33 AM	BCl3 MFC set to  0.000000
8/2/2012	11:35:33 AM	PH3 MFC set to  0.000000
8/2/2012	11:35:33 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:35:33 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:35:33 AM	Tube furnace set to 150
8/2/2012	11:36:03 AM	H2 valve closed
8/2/2012	11:36:03 AM	BCl3 valve closed
8/2/2012	11:36:03 AM	PH3 valve closed
8/2/2012	11:36:03 AM	SiCl4 pre valve closed
8/2/2012	11:36:03 AM	SiCl4 post valve closed
8/2/2012	11:36:03 AM	Bypass valve closed
8/2/2012	11:36:03 AM	Bubbler valve closed
8/2/2012	11:36:03 AM	Helium valve opened
8/2/2012	11:36:03 AM	Main Vac valve opened
8/2/2012	11:36:03 AM	Helium MFC set to  20.000000
8/2/2012	11:36:03 AM	H2 MFC set to  0.000000
8/2/2012	11:36:03 AM	BCl3 MFC set to  0.000000
8/2/2012	11:36:03 AM	PH3 MFC set to  0.000000
8/2/2012	11:36:03 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:36:03 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:36:03 AM	Tube furnace set to 150
8/2/2012	11:36:33 AM	Helium valve closed
8/2/2012	11:36:33 AM	H2 valve closed
8/2/2012	11:36:33 AM	BCl3 valve closed
8/2/2012	11:36:33 AM	PH3 valve closed
8/2/2012	11:36:33 AM	SiCl4 pre valve closed
8/2/2012	11:36:33 AM	SiCl4 post valve closed
8/2/2012	11:36:33 AM	Bypass valve closed
8/2/2012	11:36:33 AM	Bubbler valve closed
8/2/2012	11:36:33 AM	Main Vac valve opened
8/2/2012	11:36:33 AM	Helium MFC set to  0.000000
8/2/2012	11:36:33 AM	H2 MFC set to  0.000000
8/2/2012	11:36:33 AM	BCl3 MFC set to  0.000000
8/2/2012	11:36:33 AM	PH3 MFC set to  0.000000
8/2/2012	11:36:33 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:36:33 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:36:33 AM	Tube furnace set to 150
8/2/2012	11:37:03 AM	H2 valve closed
8/2/2012	11:37:03 AM	BCl3 valve closed
8/2/2012	11:37:03 AM	PH3 valve closed
8/2/2012	11:37:03 AM	SiCl4 pre valve closed
8/2/2012	11:37:03 AM	SiCl4 post valve closed
8/2/2012	11:37:03 AM	Bypass valve closed
8/2/2012	11:37:03 AM	Bubbler valve closed
8/2/2012	11:37:03 AM	Helium valve opened
8/2/2012	11:37:03 AM	Main Vac valve opened
8/2/2012	11:37:03 AM	Helium MFC set to  20.000000
8/2/2012	11:37:03 AM	H2 MFC set to  0.000000
8/2/2012	11:37:03 AM	BCl3 MFC set to  0.000000
8/2/2012	11:37:03 AM	PH3 MFC set to  0.000000
8/2/2012	11:37:03 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:37:03 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:37:03 AM	Tube furnace set to 150
8/2/2012	11:39:03 AM	Helium valve closed
8/2/2012	11:39:03 AM	H2 valve closed
8/2/2012	11:39:03 AM	BCl3 valve closed
8/2/2012	11:39:03 AM	PH3 valve closed
8/2/2012	11:39:03 AM	SiCl4 pre valve closed
8/2/2012	11:39:03 AM	SiCl4 post valve closed
8/2/2012	11:39:03 AM	Bypass valve closed
8/2/2012	11:39:03 AM	Bubbler valve closed
8/2/2012	11:39:03 AM	Main Vac valve opened
8/2/2012	11:39:03 AM	Helium MFC set to  0.000000
8/2/2012	11:39:04 AM	H2 MFC set to  0.000000
8/2/2012	11:39:04 AM	BCl3 MFC set to  0.000000
8/2/2012	11:39:04 AM	PH3 MFC set to  0.000000
8/2/2012	11:39:04 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:39:04 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:39:04 AM	Tube furnace set to 150
8/2/2012	11:39:05 AM	Run finished at 11:39 AM
8/2/2012	11:40:21 AM	Recipe started at 11:40 AM
8/2/2012	11:40:21 AM	Helium valve closed
8/2/2012	11:40:21 AM	H2 valve closed
8/2/2012	11:40:21 AM	BCl3 valve closed
8/2/2012	11:40:21 AM	PH3 valve closed
8/2/2012	11:40:21 AM	SiCl4 pre valve closed
8/2/2012	11:40:21 AM	SiCl4 post valve closed
8/2/2012	11:40:21 AM	Bypass valve closed
8/2/2012	11:40:21 AM	Bubbler valve closed
8/2/2012	11:40:21 AM	Main Vac valve opened
8/2/2012	11:40:21 AM	Helium MFC set to  0.000000
8/2/2012	11:40:21 AM	H2 MFC set to  0.000000
8/2/2012	11:40:21 AM	BCl3 MFC set to  0.000000
8/2/2012	11:40:21 AM	PH3 MFC set to  0.000000
8/2/2012	11:40:21 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:40:21 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:40:21 AM	Tube furnace set to 150
8/2/2012	11:40:51 AM	H2 valve closed
8/2/2012	11:40:51 AM	BCl3 valve closed
8/2/2012	11:40:51 AM	PH3 valve closed
8/2/2012	11:40:51 AM	SiCl4 pre valve closed
8/2/2012	11:40:51 AM	SiCl4 post valve closed
8/2/2012	11:40:51 AM	Bypass valve closed
8/2/2012	11:40:51 AM	Bubbler valve closed
8/2/2012	11:40:51 AM	Helium valve opened
8/2/2012	11:40:51 AM	Main Vac valve opened
8/2/2012	11:40:51 AM	Helium MFC set to  20.000000
8/2/2012	11:40:51 AM	H2 MFC set to  0.000000
8/2/2012	11:40:51 AM	BCl3 MFC set to  0.000000
8/2/2012	11:40:51 AM	PH3 MFC set to  0.000000
8/2/2012	11:40:51 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:40:51 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:40:52 AM	Tube furnace set to 150
8/2/2012	11:41:22 AM	Helium valve closed
8/2/2012	11:41:22 AM	H2 valve closed
8/2/2012	11:41:22 AM	BCl3 valve closed
8/2/2012	11:41:22 AM	PH3 valve closed
8/2/2012	11:41:22 AM	SiCl4 pre valve closed
8/2/2012	11:41:22 AM	SiCl4 post valve closed
8/2/2012	11:41:22 AM	Bypass valve closed
8/2/2012	11:41:22 AM	Bubbler valve closed
8/2/2012	11:41:22 AM	Main Vac valve opened
8/2/2012	11:41:22 AM	Helium MFC set to  0.000000
8/2/2012	11:41:22 AM	H2 MFC set to  0.000000
8/2/2012	11:41:22 AM	BCl3 MFC set to  0.000000
8/2/2012	11:41:22 AM	PH3 MFC set to  0.000000
8/2/2012	11:41:22 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:41:22 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:41:22 AM	Tube furnace set to 150
8/2/2012	11:41:52 AM	H2 valve closed
8/2/2012	11:41:52 AM	BCl3 valve closed
8/2/2012	11:41:52 AM	PH3 valve closed
8/2/2012	11:41:52 AM	SiCl4 pre valve closed
8/2/2012	11:41:52 AM	SiCl4 post valve closed
8/2/2012	11:41:52 AM	Bypass valve closed
8/2/2012	11:41:52 AM	Bubbler valve closed
8/2/2012	11:41:52 AM	Helium valve opened
8/2/2012	11:41:52 AM	Main Vac valve opened
8/2/2012	11:41:52 AM	Helium MFC set to  20.000000
8/2/2012	11:41:52 AM	H2 MFC set to  0.000000
8/2/2012	11:41:52 AM	BCl3 MFC set to  0.000000
8/2/2012	11:41:52 AM	PH3 MFC set to  0.000000
8/2/2012	11:41:52 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:41:52 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:41:52 AM	Tube furnace set to 150
8/2/2012	11:42:22 AM	Helium valve closed
8/2/2012	11:42:22 AM	H2 valve closed
8/2/2012	11:42:22 AM	BCl3 valve closed
8/2/2012	11:42:22 AM	PH3 valve closed
8/2/2012	11:42:22 AM	SiCl4 pre valve closed
8/2/2012	11:42:22 AM	SiCl4 post valve closed
8/2/2012	11:42:22 AM	Bypass valve closed
8/2/2012	11:42:22 AM	Bubbler valve closed
8/2/2012	11:42:22 AM	Main Vac valve opened
8/2/2012	11:42:22 AM	Helium MFC set to  0.000000
8/2/2012	11:42:22 AM	H2 MFC set to  0.000000
8/2/2012	11:42:22 AM	BCl3 MFC set to  0.000000
8/2/2012	11:42:22 AM	PH3 MFC set to  0.000000
8/2/2012	11:42:22 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:42:22 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:42:22 AM	Tube furnace set to 150
8/2/2012	11:42:52 AM	H2 valve closed
8/2/2012	11:42:52 AM	BCl3 valve closed
8/2/2012	11:42:52 AM	PH3 valve closed
8/2/2012	11:42:52 AM	SiCl4 pre valve closed
8/2/2012	11:42:52 AM	SiCl4 post valve closed
8/2/2012	11:42:52 AM	Bypass valve closed
8/2/2012	11:42:52 AM	Bubbler valve closed
8/2/2012	11:42:52 AM	Helium valve opened
8/2/2012	11:42:52 AM	Main Vac valve opened
8/2/2012	11:42:52 AM	Helium MFC set to  20.000000
8/2/2012	11:42:52 AM	H2 MFC set to  0.000000
8/2/2012	11:42:52 AM	BCl3 MFC set to  0.000000
8/2/2012	11:42:52 AM	PH3 MFC set to  0.000000
8/2/2012	11:42:52 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:42:52 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:42:53 AM	Tube furnace set to 150
8/2/2012	11:44:53 AM	Helium valve closed
8/2/2012	11:44:53 AM	H2 valve closed
8/2/2012	11:44:53 AM	BCl3 valve closed
8/2/2012	11:44:53 AM	PH3 valve closed
8/2/2012	11:44:53 AM	SiCl4 pre valve closed
8/2/2012	11:44:53 AM	SiCl4 post valve closed
8/2/2012	11:44:53 AM	Bypass valve closed
8/2/2012	11:44:53 AM	Bubbler valve closed
8/2/2012	11:44:53 AM	Main Vac valve opened
8/2/2012	11:44:53 AM	Helium MFC set to  0.000000
8/2/2012	11:44:53 AM	H2 MFC set to  0.000000
8/2/2012	11:44:53 AM	BCl3 MFC set to  0.000000
8/2/2012	11:44:53 AM	PH3 MFC set to  0.000000
8/2/2012	11:44:53 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:44:53 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:44:53 AM	Tube furnace set to 150
8/2/2012	11:45:23 AM	H2 valve closed
8/2/2012	11:45:23 AM	BCl3 valve closed
8/2/2012	11:45:23 AM	PH3 valve closed
8/2/2012	11:45:23 AM	SiCl4 pre valve closed
8/2/2012	11:45:23 AM	SiCl4 post valve closed
8/2/2012	11:45:23 AM	Bypass valve closed
8/2/2012	11:45:23 AM	Bubbler valve closed
8/2/2012	11:45:23 AM	Helium valve opened
8/2/2012	11:45:23 AM	Main Vac valve opened
8/2/2012	11:45:23 AM	Helium MFC set to  20.000000
8/2/2012	11:45:23 AM	H2 MFC set to  0.000000
8/2/2012	11:45:23 AM	BCl3 MFC set to  0.000000
8/2/2012	11:45:23 AM	PH3 MFC set to  0.000000
8/2/2012	11:45:23 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:45:23 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:45:23 AM	Tube furnace set to 150
8/2/2012	11:45:53 AM	Helium valve closed
8/2/2012	11:45:53 AM	H2 valve closed
8/2/2012	11:45:53 AM	BCl3 valve closed
8/2/2012	11:45:53 AM	PH3 valve closed
8/2/2012	11:45:53 AM	SiCl4 pre valve closed
8/2/2012	11:45:53 AM	SiCl4 post valve closed
8/2/2012	11:45:53 AM	Bypass valve closed
8/2/2012	11:45:53 AM	Bubbler valve closed
8/2/2012	11:45:53 AM	Main Vac valve opened
8/2/2012	11:45:53 AM	Helium MFC set to  0.000000
8/2/2012	11:45:53 AM	H2 MFC set to  0.000000
8/2/2012	11:45:53 AM	BCl3 MFC set to  0.000000
8/2/2012	11:45:53 AM	PH3 MFC set to  0.000000
8/2/2012	11:45:53 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:45:53 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:45:53 AM	Tube furnace set to 150
8/2/2012	11:46:23 AM	H2 valve closed
8/2/2012	11:46:23 AM	BCl3 valve closed
8/2/2012	11:46:23 AM	PH3 valve closed
8/2/2012	11:46:23 AM	SiCl4 pre valve closed
8/2/2012	11:46:23 AM	SiCl4 post valve closed
8/2/2012	11:46:23 AM	Bypass valve closed
8/2/2012	11:46:23 AM	Bubbler valve closed
8/2/2012	11:46:23 AM	Helium valve opened
8/2/2012	11:46:23 AM	Main Vac valve opened
8/2/2012	11:46:23 AM	Helium MFC set to  20.000000
8/2/2012	11:46:23 AM	H2 MFC set to  0.000000
8/2/2012	11:46:23 AM	BCl3 MFC set to  0.000000
8/2/2012	11:46:23 AM	PH3 MFC set to  0.000000
8/2/2012	11:46:23 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:46:23 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:46:24 AM	Tube furnace set to 150
8/2/2012	11:46:54 AM	Helium valve closed
8/2/2012	11:46:54 AM	H2 valve closed
8/2/2012	11:46:54 AM	BCl3 valve closed
8/2/2012	11:46:54 AM	PH3 valve closed
8/2/2012	11:46:54 AM	SiCl4 pre valve closed
8/2/2012	11:46:54 AM	SiCl4 post valve closed
8/2/2012	11:46:54 AM	Bypass valve closed
8/2/2012	11:46:54 AM	Bubbler valve closed
8/2/2012	11:46:54 AM	Main Vac valve opened
8/2/2012	11:46:54 AM	Helium MFC set to  0.000000
8/2/2012	11:46:54 AM	H2 MFC set to  0.000000
8/2/2012	11:46:54 AM	BCl3 MFC set to  0.000000
8/2/2012	11:46:54 AM	PH3 MFC set to  0.000000
8/2/2012	11:46:54 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:46:54 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:46:54 AM	Tube furnace set to 150
8/2/2012	11:47:24 AM	H2 valve closed
8/2/2012	11:47:24 AM	BCl3 valve closed
8/2/2012	11:47:24 AM	PH3 valve closed
8/2/2012	11:47:24 AM	SiCl4 pre valve closed
8/2/2012	11:47:24 AM	SiCl4 post valve closed
8/2/2012	11:47:24 AM	Bypass valve closed
8/2/2012	11:47:24 AM	Bubbler valve closed
8/2/2012	11:47:24 AM	Helium valve opened
8/2/2012	11:47:24 AM	Main Vac valve opened
8/2/2012	11:47:24 AM	Helium MFC set to  20.000000
8/2/2012	11:47:24 AM	H2 MFC set to  0.000000
8/2/2012	11:47:24 AM	BCl3 MFC set to  0.000000
8/2/2012	11:47:24 AM	PH3 MFC set to  0.000000
8/2/2012	11:47:24 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:47:24 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:47:24 AM	Tube furnace set to 150
8/2/2012	11:49:24 AM	Helium valve closed
8/2/2012	11:49:24 AM	H2 valve closed
8/2/2012	11:49:24 AM	BCl3 valve closed
8/2/2012	11:49:24 AM	PH3 valve closed
8/2/2012	11:49:24 AM	SiCl4 pre valve closed
8/2/2012	11:49:24 AM	SiCl4 post valve closed
8/2/2012	11:49:24 AM	Bypass valve closed
8/2/2012	11:49:24 AM	Bubbler valve closed
8/2/2012	11:49:24 AM	Main Vac valve opened
8/2/2012	11:49:24 AM	Helium MFC set to  0.000000
8/2/2012	11:49:24 AM	H2 MFC set to  0.000000
8/2/2012	11:49:24 AM	BCl3 MFC set to  0.000000
8/2/2012	11:49:24 AM	PH3 MFC set to  0.000000
8/2/2012	11:49:24 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:49:24 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:49:24 AM	Tube furnace set to 150
8/2/2012	11:49:54 AM	H2 valve closed
8/2/2012	11:49:54 AM	BCl3 valve closed
8/2/2012	11:49:54 AM	PH3 valve closed
8/2/2012	11:49:54 AM	SiCl4 pre valve closed
8/2/2012	11:49:54 AM	SiCl4 post valve closed
8/2/2012	11:49:54 AM	Bypass valve closed
8/2/2012	11:49:54 AM	Bubbler valve closed
8/2/2012	11:49:54 AM	Helium valve opened
8/2/2012	11:49:54 AM	Main Vac valve opened
8/2/2012	11:49:54 AM	Helium MFC set to  20.000000
8/2/2012	11:49:54 AM	H2 MFC set to  0.000000
8/2/2012	11:49:54 AM	BCl3 MFC set to  0.000000
8/2/2012	11:49:54 AM	PH3 MFC set to  0.000000
8/2/2012	11:49:54 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:49:54 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:49:54 AM	Tube furnace set to 150
8/2/2012	11:50:24 AM	Helium valve closed
8/2/2012	11:50:24 AM	H2 valve closed
8/2/2012	11:50:24 AM	BCl3 valve closed
8/2/2012	11:50:24 AM	PH3 valve closed
8/2/2012	11:50:25 AM	SiCl4 pre valve closed
8/2/2012	11:50:25 AM	SiCl4 post valve closed
8/2/2012	11:50:25 AM	Bypass valve closed
8/2/2012	11:50:25 AM	Bubbler valve closed
8/2/2012	11:50:25 AM	Main Vac valve opened
8/2/2012	11:50:25 AM	Helium MFC set to  0.000000
8/2/2012	11:50:25 AM	H2 MFC set to  0.000000
8/2/2012	11:50:25 AM	BCl3 MFC set to  0.000000
8/2/2012	11:50:25 AM	PH3 MFC set to  0.000000
8/2/2012	11:50:25 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:50:25 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:50:25 AM	Tube furnace set to 150
8/2/2012	11:50:55 AM	H2 valve closed
8/2/2012	11:50:55 AM	BCl3 valve closed
8/2/2012	11:50:55 AM	PH3 valve closed
8/2/2012	11:50:55 AM	SiCl4 pre valve closed
8/2/2012	11:50:55 AM	SiCl4 post valve closed
8/2/2012	11:50:55 AM	Bypass valve closed
8/2/2012	11:50:55 AM	Bubbler valve closed
8/2/2012	11:50:55 AM	Helium valve opened
8/2/2012	11:50:55 AM	Main Vac valve opened
8/2/2012	11:50:55 AM	Helium MFC set to  20.000000
8/2/2012	11:50:55 AM	H2 MFC set to  0.000000
8/2/2012	11:50:55 AM	BCl3 MFC set to  0.000000
8/2/2012	11:50:55 AM	PH3 MFC set to  0.000000
8/2/2012	11:50:55 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:50:55 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:50:55 AM	Tube furnace set to 150
8/2/2012	11:52:55 AM	Helium valve closed
8/2/2012	11:52:55 AM	H2 valve closed
8/2/2012	11:52:55 AM	BCl3 valve closed
8/2/2012	11:52:55 AM	PH3 valve closed
8/2/2012	11:52:55 AM	SiCl4 pre valve closed
8/2/2012	11:52:55 AM	SiCl4 post valve closed
8/2/2012	11:52:55 AM	Bypass valve closed
8/2/2012	11:52:55 AM	Bubbler valve closed
8/2/2012	11:52:55 AM	Main Vac valve opened
8/2/2012	11:52:55 AM	Helium MFC set to  0.000000
8/2/2012	11:52:55 AM	H2 MFC set to  0.000000
8/2/2012	11:52:55 AM	BCl3 MFC set to  0.000000
8/2/2012	11:52:55 AM	PH3 MFC set to  0.000000
8/2/2012	11:52:55 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:52:55 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:52:55 AM	Tube furnace set to 150
8/2/2012	11:53:25 AM	H2 valve closed
8/2/2012	11:53:25 AM	BCl3 valve closed
8/2/2012	11:53:25 AM	PH3 valve closed
8/2/2012	11:53:25 AM	SiCl4 pre valve closed
8/2/2012	11:53:25 AM	SiCl4 post valve closed
8/2/2012	11:53:25 AM	Bypass valve closed
8/2/2012	11:53:25 AM	Bubbler valve closed
8/2/2012	11:53:25 AM	Helium valve opened
8/2/2012	11:53:25 AM	Main Vac valve opened
8/2/2012	11:53:25 AM	Helium MFC set to  20.000000
8/2/2012	11:53:25 AM	H2 MFC set to  0.000000
8/2/2012	11:53:25 AM	BCl3 MFC set to  0.000000
8/2/2012	11:53:25 AM	PH3 MFC set to  0.000000
8/2/2012	11:53:25 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:53:25 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:53:25 AM	Tube furnace set to 150
8/2/2012	11:53:55 AM	Helium valve closed
8/2/2012	11:53:55 AM	H2 valve closed
8/2/2012	11:53:55 AM	BCl3 valve closed
8/2/2012	11:53:55 AM	PH3 valve closed
8/2/2012	11:53:55 AM	SiCl4 pre valve closed
8/2/2012	11:53:55 AM	SiCl4 post valve closed
8/2/2012	11:53:55 AM	Bypass valve closed
8/2/2012	11:53:55 AM	Bubbler valve closed
8/2/2012	11:53:55 AM	Main Vac valve opened
8/2/2012	11:53:55 AM	Helium MFC set to  0.000000
8/2/2012	11:53:55 AM	H2 MFC set to  0.000000
8/2/2012	11:53:55 AM	BCl3 MFC set to  0.000000
8/2/2012	11:53:55 AM	PH3 MFC set to  0.000000
8/2/2012	11:53:55 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:53:55 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:53:56 AM	Tube furnace set to 150
8/2/2012	11:54:26 AM	H2 valve closed
8/2/2012	11:54:26 AM	BCl3 valve closed
8/2/2012	11:54:26 AM	PH3 valve closed
8/2/2012	11:54:26 AM	SiCl4 pre valve closed
8/2/2012	11:54:26 AM	SiCl4 post valve closed
8/2/2012	11:54:26 AM	Bypass valve closed
8/2/2012	11:54:26 AM	Bubbler valve closed
8/2/2012	11:54:26 AM	Helium valve opened
8/2/2012	11:54:26 AM	Main Vac valve opened
8/2/2012	11:54:26 AM	Helium MFC set to  20.000000
8/2/2012	11:54:26 AM	H2 MFC set to  0.000000
8/2/2012	11:54:26 AM	BCl3 MFC set to  0.000000
8/2/2012	11:54:26 AM	PH3 MFC set to  0.000000
8/2/2012	11:54:26 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:54:26 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:54:26 AM	Tube furnace set to 150
8/2/2012	11:56:26 AM	Helium valve closed
8/2/2012	11:56:26 AM	H2 valve closed
8/2/2012	11:56:26 AM	BCl3 valve closed
8/2/2012	11:56:26 AM	PH3 valve closed
8/2/2012	11:56:26 AM	SiCl4 pre valve closed
8/2/2012	11:56:26 AM	SiCl4 post valve closed
8/2/2012	11:56:26 AM	Bypass valve closed
8/2/2012	11:56:26 AM	Bubbler valve closed
8/2/2012	11:56:26 AM	Main Vac valve opened
8/2/2012	11:56:26 AM	Helium MFC set to  0.000000
8/2/2012	11:56:26 AM	H2 MFC set to  0.000000
8/2/2012	11:56:26 AM	BCl3 MFC set to  0.000000
8/2/2012	11:56:26 AM	PH3 MFC set to  0.000000
8/2/2012	11:56:26 AM	SiCl4 MFC set to  0.000000
8/2/2012	11:56:26 AM	Bypass solenoid MFC set to  0.000000
8/2/2012	11:56:26 AM	Tube furnace set to 150
8/2/2012	11:56:27 AM	Run finished at 11:56 AM
8/2/2012	12:28:41 PM	Recipe started at 12:28 PM
8/2/2012	12:28:41 PM	Helium valve closed
8/2/2012	12:28:41 PM	H2 valve closed
8/2/2012	12:28:41 PM	BCl3 valve closed
8/2/2012	12:28:41 PM	PH3 valve closed
8/2/2012	12:28:41 PM	SiCl4 pre valve closed
8/2/2012	12:28:41 PM	SiCl4 post valve closed
8/2/2012	12:28:41 PM	Main Vac valve closed
8/2/2012	12:28:41 PM	Bypass valve closed
8/2/2012	12:28:41 PM	Bubbler valve closed
8/2/2012	12:28:41 PM	Helium MFC set to  0.000000
8/2/2012	12:28:41 PM	H2 MFC set to  0.000000
8/2/2012	12:28:41 PM	BCl3 MFC set to  0.000000
8/2/2012	12:28:41 PM	PH3 MFC set to  0.000000
8/2/2012	12:28:41 PM	SiCl4 MFC set to  0.000000
8/2/2012	12:28:41 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	12:28:41 PM	Tube furnace set to 0
8/2/2012	12:28:45 PM	Helium valve closed
8/2/2012	12:28:45 PM	BCl3 valve closed
8/2/2012	12:28:45 PM	PH3 valve closed
8/2/2012	12:28:45 PM	SiCl4 pre valve closed
8/2/2012	12:28:45 PM	SiCl4 post valve closed
8/2/2012	12:28:45 PM	Main Vac valve closed
8/2/2012	12:28:45 PM	Bypass valve closed
8/2/2012	12:28:45 PM	Bubbler valve closed
8/2/2012	12:28:45 PM	H2 valve opened
8/2/2012	12:28:45 PM	Helium MFC set to  0.000000
8/2/2012	12:28:45 PM	H2 MFC set to  500.000000
8/2/2012	12:28:45 PM	BCl3 MFC set to  0.000000
8/2/2012	12:28:45 PM	PH3 MFC set to  0.000000
8/2/2012	12:28:45 PM	SiCl4 MFC set to  0.000000
8/2/2012	12:28:45 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	12:28:45 PM	Tube furnace set to 0
8/2/2012	12:29:56 PM	Helium valve closed
8/2/2012	12:29:56 PM	BCl3 valve closed
8/2/2012	12:29:56 PM	PH3 valve closed
8/2/2012	12:29:56 PM	SiCl4 pre valve closed
8/2/2012	12:29:56 PM	SiCl4 post valve closed
8/2/2012	12:29:56 PM	Main Vac valve closed
8/2/2012	12:29:56 PM	Bypass valve closed
8/2/2012	12:29:56 PM	H2 valve opened
8/2/2012	12:29:56 PM	Bubbler valve opened
8/2/2012	12:29:56 PM	Helium MFC set to  0.000000
8/2/2012	12:29:56 PM	H2 MFC set to  500.000000
8/2/2012	12:29:56 PM	BCl3 MFC set to  0.000000
8/2/2012	12:29:56 PM	PH3 MFC set to  0.000000
8/2/2012	12:29:56 PM	SiCl4 MFC set to  0.000000
8/2/2012	12:29:56 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	12:29:56 PM	Tube furnace set to 0
8/2/2012	12:29:57 PM	Helium valve closed
8/2/2012	12:29:57 PM	BCl3 valve closed
8/2/2012	12:29:57 PM	PH3 valve closed
8/2/2012	12:29:57 PM	SiCl4 pre valve closed
8/2/2012	12:29:57 PM	SiCl4 post valve closed
8/2/2012	12:29:57 PM	Main Vac valve closed
8/2/2012	12:29:57 PM	Bypass valve closed
8/2/2012	12:29:57 PM	H2 valve opened
8/2/2012	12:29:57 PM	Bubbler valve opened
8/2/2012	12:29:57 PM	Helium MFC set to  0.000000
8/2/2012	12:29:57 PM	H2 MFC set to  500.000000
8/2/2012	12:29:57 PM	BCl3 MFC set to  0.000000
8/2/2012	12:29:57 PM	PH3 MFC set to  0.000000
8/2/2012	12:29:57 PM	SiCl4 MFC set to  0.000000
8/2/2012	12:29:57 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	12:29:57 PM	Tube furnace set to 1000
8/2/2012	12:49:57 PM	Helium valve closed
8/2/2012	12:49:57 PM	BCl3 valve closed
8/2/2012	12:49:57 PM	PH3 valve closed
8/2/2012	12:49:57 PM	Main Vac valve closed
8/2/2012	12:49:57 PM	Bypass valve closed
8/2/2012	12:49:57 PM	H2 valve opened
8/2/2012	12:49:57 PM	SiCl4 pre valve opened
8/2/2012	12:49:57 PM	SiCl4 post valve opened
8/2/2012	12:49:57 PM	Bubbler valve opened
8/2/2012	12:49:57 PM	Helium MFC set to  0.000000
8/2/2012	12:49:57 PM	H2 MFC set to  500.000000
8/2/2012	12:49:57 PM	BCl3 MFC set to  0.000000
8/2/2012	12:49:57 PM	PH3 MFC set to  0.000000
8/2/2012	12:49:57 PM	SiCl4 MFC set to  50.000000
8/2/2012	12:49:57 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	12:49:58 PM	Tube furnace set to 1000
8/2/2012	12:59:58 PM	Helium valve closed
8/2/2012	12:59:58 PM	BCl3 valve closed
8/2/2012	12:59:58 PM	PH3 valve closed
8/2/2012	12:59:58 PM	SiCl4 pre valve closed
8/2/2012	12:59:58 PM	SiCl4 post valve closed
8/2/2012	12:59:58 PM	Main Vac valve closed
8/2/2012	12:59:58 PM	Bypass valve closed
8/2/2012	12:59:58 PM	H2 valve opened
8/2/2012	12:59:58 PM	Bubbler valve opened
8/2/2012	12:59:58 PM	Helium MFC set to  0.000000
8/2/2012	12:59:58 PM	H2 MFC set to  500.000000
8/2/2012	12:59:58 PM	BCl3 MFC set to  0.000000
8/2/2012	12:59:58 PM	PH3 MFC set to  0.000000
8/2/2012	12:59:58 PM	SiCl4 MFC set to  0.000000
8/2/2012	12:59:58 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	12:59:58 PM	Tube furnace set to 750
8/2/2012	1:04:58 PM	H2 valve closed
8/2/2012	1:04:58 PM	BCl3 valve closed
8/2/2012	1:04:58 PM	PH3 valve closed
8/2/2012	1:04:58 PM	SiCl4 pre valve closed
8/2/2012	1:04:58 PM	SiCl4 post valve closed
8/2/2012	1:04:58 PM	Main Vac valve closed
8/2/2012	1:04:58 PM	Bypass valve closed
8/2/2012	1:04:58 PM	Helium valve opened
8/2/2012	1:04:58 PM	Bubbler valve opened
8/2/2012	1:04:58 PM	Helium MFC set to  500.000000
8/2/2012	1:04:58 PM	H2 MFC set to  0.000000
8/2/2012	1:04:58 PM	BCl3 MFC set to  0.000000
8/2/2012	1:04:58 PM	PH3 MFC set to  0.000000
8/2/2012	1:04:58 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:04:58 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:04:58 PM	Tube furnace set to 0
8/2/2012	1:16:27 PM	Run aborted at 1:16 PM
8/2/2012	1:16:27 PM	Helium valve closed
8/2/2012	1:16:27 PM	H2 valve closed
8/2/2012	1:16:27 PM	BCl3 valve closed
8/2/2012	1:16:27 PM	PH3 valve closed
8/2/2012	1:16:27 PM	SiCl4 pre valve closed
8/2/2012	1:16:27 PM	SiCl4 post valve closed
8/2/2012	1:16:27 PM	Bypass valve closed
8/2/2012	1:16:27 PM	Main Vac valve closed
8/2/2012	1:16:27 PM	Bubbler valve closed
8/2/2012	1:16:27 PM	Helium MFC set to  0.000000
8/2/2012	1:16:27 PM	H2 MFC set to  0.000000
8/2/2012	1:16:27 PM	BCl3 MFC set to  0.000000
8/2/2012	1:16:27 PM	PH3 MFC set to  0.000000
8/2/2012	1:16:27 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:16:27 PM	Tube furnace set to 0
8/2/2012	1:16:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2012	1:16:29 PM	Recipe started at 1:16 PM
8/2/2012	1:16:29 PM	Helium valve closed
8/2/2012	1:16:29 PM	H2 valve closed
8/2/2012	1:16:29 PM	BCl3 valve closed
8/2/2012	1:16:29 PM	PH3 valve closed
8/2/2012	1:16:29 PM	SiCl4 pre valve closed
8/2/2012	1:16:29 PM	SiCl4 post valve closed
8/2/2012	1:16:29 PM	Main Vac valve closed
8/2/2012	1:16:29 PM	Bypass valve closed
8/2/2012	1:16:29 PM	Bubbler valve closed
8/2/2012	1:16:29 PM	Helium MFC set to  0.000000
8/2/2012	1:16:29 PM	H2 MFC set to  0.000000
8/2/2012	1:16:29 PM	BCl3 MFC set to  0.000000
8/2/2012	1:16:29 PM	PH3 MFC set to  0.000000
8/2/2012	1:16:29 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:16:29 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:16:29 PM	Tube furnace set to 0
8/2/2012	1:16:32 PM	H2 valve closed
8/2/2012	1:16:32 PM	BCl3 valve closed
8/2/2012	1:16:32 PM	PH3 valve closed
8/2/2012	1:16:32 PM	SiCl4 pre valve closed
8/2/2012	1:16:32 PM	SiCl4 post valve closed
8/2/2012	1:16:32 PM	Main Vac valve closed
8/2/2012	1:16:32 PM	Bypass valve closed
8/2/2012	1:16:32 PM	Bubbler valve closed
8/2/2012	1:16:32 PM	Helium valve opened
8/2/2012	1:16:32 PM	Helium MFC set to  500.000000
8/2/2012	1:16:32 PM	H2 MFC set to  0.000000
8/2/2012	1:16:32 PM	BCl3 MFC set to  0.000000
8/2/2012	1:16:32 PM	PH3 MFC set to  0.000000
8/2/2012	1:16:32 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:16:32 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:16:33 PM	Tube furnace set to 0
8/2/2012	1:16:33 PM	Helium valve closed
8/2/2012	1:16:33 PM	H2 valve closed
8/2/2012	1:16:33 PM	BCl3 valve closed
8/2/2012	1:16:33 PM	PH3 valve closed
8/2/2012	1:16:33 PM	SiCl4 pre valve closed
8/2/2012	1:16:33 PM	SiCl4 post valve closed
8/2/2012	1:16:33 PM	Main Vac valve closed
8/2/2012	1:16:33 PM	Bypass valve closed
8/2/2012	1:16:33 PM	Bubbler valve closed
8/2/2012	1:16:33 PM	Helium MFC set to  0.000000
8/2/2012	1:16:33 PM	H2 MFC set to  0.000000
8/2/2012	1:16:33 PM	BCl3 MFC set to  0.000000
8/2/2012	1:16:33 PM	PH3 MFC set to  0.000000
8/2/2012	1:16:33 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:16:33 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:16:33 PM	Tube furnace set to 0
8/2/2012	1:16:34 PM	Run finished at 1:16 PM
8/2/2012	1:16:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2012	1:18:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2012	1:18:10 PM	Recipe started at 1:18 PM
8/2/2012	1:18:10 PM	Helium valve closed
8/2/2012	1:18:10 PM	H2 valve closed
8/2/2012	1:18:10 PM	BCl3 valve closed
8/2/2012	1:18:10 PM	PH3 valve closed
8/2/2012	1:18:10 PM	SiCl4 pre valve closed
8/2/2012	1:18:10 PM	SiCl4 post valve closed
8/2/2012	1:18:10 PM	Main Vac valve closed
8/2/2012	1:18:10 PM	Bubbler valve closed
8/2/2012	1:18:10 PM	Bypass valve opened
8/2/2012	1:18:10 PM	Helium MFC set to  0.000000
8/2/2012	1:18:10 PM	H2 MFC set to  0.000000
8/2/2012	1:18:10 PM	BCl3 MFC set to  0.000000
8/2/2012	1:18:10 PM	PH3 MFC set to  0.000000
8/2/2012	1:18:10 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:18:10 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:18:11 PM	Tube furnace set to 0
8/2/2012	1:19:14 PM	Helium valve closed
8/2/2012	1:19:14 PM	H2 valve closed
8/2/2012	1:19:14 PM	BCl3 valve closed
8/2/2012	1:19:14 PM	PH3 valve closed
8/2/2012	1:19:14 PM	SiCl4 pre valve closed
8/2/2012	1:19:14 PM	SiCl4 post valve closed
8/2/2012	1:19:14 PM	Main Vac valve closed
8/2/2012	1:19:14 PM	Bubbler valve closed
8/2/2012	1:19:14 PM	Bypass valve opened
8/2/2012	1:19:14 PM	Helium MFC set to  0.000000
8/2/2012	1:19:14 PM	H2 MFC set to  0.000000
8/2/2012	1:19:14 PM	BCl3 MFC set to  0.000000
8/2/2012	1:19:14 PM	PH3 MFC set to  0.000000
8/2/2012	1:19:14 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:19:14 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:19:14 PM	Tube furnace set to 0
8/2/2012	1:20:14 PM	Helium valve closed
8/2/2012	1:20:14 PM	H2 valve closed
8/2/2012	1:20:14 PM	BCl3 valve closed
8/2/2012	1:20:14 PM	PH3 valve closed
8/2/2012	1:20:14 PM	SiCl4 pre valve closed
8/2/2012	1:20:14 PM	SiCl4 post valve closed
8/2/2012	1:20:14 PM	Bypass valve closed
8/2/2012	1:20:14 PM	Bubbler valve closed
8/2/2012	1:20:14 PM	Main Vac valve opened
8/2/2012	1:20:14 PM	Helium MFC set to  0.000000
8/2/2012	1:20:14 PM	H2 MFC set to  0.000000
8/2/2012	1:20:14 PM	BCl3 MFC set to  0.000000
8/2/2012	1:20:14 PM	PH3 MFC set to  0.000000
8/2/2012	1:20:14 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:20:14 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:20:14 PM	Tube furnace set to 0
8/2/2012	1:20:15 PM	Run finished at 1:20 PM
8/2/2012	1:20:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2012	1:22:33 PM	Recipe started at 1:22 PM
8/2/2012	1:22:33 PM	Helium valve closed
8/2/2012	1:22:33 PM	H2 valve closed
8/2/2012	1:22:33 PM	BCl3 valve closed
8/2/2012	1:22:33 PM	PH3 valve closed
8/2/2012	1:22:33 PM	SiCl4 pre valve closed
8/2/2012	1:22:33 PM	SiCl4 post valve closed
8/2/2012	1:22:33 PM	Bypass valve closed
8/2/2012	1:22:33 PM	Bubbler valve closed
8/2/2012	1:22:33 PM	Main Vac valve opened
8/2/2012	1:22:33 PM	Helium MFC set to  0.000000
8/2/2012	1:22:33 PM	H2 MFC set to  0.000000
8/2/2012	1:22:33 PM	BCl3 MFC set to  0.000000
8/2/2012	1:22:33 PM	PH3 MFC set to  0.000000
8/2/2012	1:22:33 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:22:33 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:22:33 PM	Tube furnace set to 150
8/2/2012	1:23:03 PM	H2 valve closed
8/2/2012	1:23:03 PM	BCl3 valve closed
8/2/2012	1:23:03 PM	PH3 valve closed
8/2/2012	1:23:03 PM	SiCl4 pre valve closed
8/2/2012	1:23:03 PM	SiCl4 post valve closed
8/2/2012	1:23:03 PM	Bypass valve closed
8/2/2012	1:23:03 PM	Bubbler valve closed
8/2/2012	1:23:03 PM	Helium valve opened
8/2/2012	1:23:03 PM	Main Vac valve opened
8/2/2012	1:23:03 PM	Helium MFC set to  20.000000
8/2/2012	1:23:03 PM	H2 MFC set to  0.000000
8/2/2012	1:23:03 PM	BCl3 MFC set to  0.000000
8/2/2012	1:23:03 PM	PH3 MFC set to  0.000000
8/2/2012	1:23:03 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:23:03 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:23:03 PM	Tube furnace set to 150
8/2/2012	1:23:33 PM	Helium valve closed
8/2/2012	1:23:33 PM	H2 valve closed
8/2/2012	1:23:33 PM	BCl3 valve closed
8/2/2012	1:23:33 PM	PH3 valve closed
8/2/2012	1:23:33 PM	SiCl4 pre valve closed
8/2/2012	1:23:33 PM	SiCl4 post valve closed
8/2/2012	1:23:33 PM	Bypass valve closed
8/2/2012	1:23:33 PM	Bubbler valve closed
8/2/2012	1:23:33 PM	Main Vac valve opened
8/2/2012	1:23:33 PM	Helium MFC set to  0.000000
8/2/2012	1:23:33 PM	H2 MFC set to  0.000000
8/2/2012	1:23:33 PM	BCl3 MFC set to  0.000000
8/2/2012	1:23:33 PM	PH3 MFC set to  0.000000
8/2/2012	1:23:33 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:23:33 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:23:34 PM	Tube furnace set to 150
8/2/2012	1:24:04 PM	H2 valve closed
8/2/2012	1:24:04 PM	BCl3 valve closed
8/2/2012	1:24:04 PM	PH3 valve closed
8/2/2012	1:24:04 PM	SiCl4 pre valve closed
8/2/2012	1:24:04 PM	SiCl4 post valve closed
8/2/2012	1:24:04 PM	Bypass valve closed
8/2/2012	1:24:04 PM	Bubbler valve closed
8/2/2012	1:24:04 PM	Helium valve opened
8/2/2012	1:24:04 PM	Main Vac valve opened
8/2/2012	1:24:04 PM	Helium MFC set to  20.000000
8/2/2012	1:24:04 PM	H2 MFC set to  0.000000
8/2/2012	1:24:04 PM	BCl3 MFC set to  0.000000
8/2/2012	1:24:04 PM	PH3 MFC set to  0.000000
8/2/2012	1:24:04 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:24:04 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:24:04 PM	Tube furnace set to 150
8/2/2012	1:24:34 PM	Helium valve closed
8/2/2012	1:24:34 PM	H2 valve closed
8/2/2012	1:24:34 PM	BCl3 valve closed
8/2/2012	1:24:34 PM	PH3 valve closed
8/2/2012	1:24:34 PM	SiCl4 pre valve closed
8/2/2012	1:24:34 PM	SiCl4 post valve closed
8/2/2012	1:24:34 PM	Bypass valve closed
8/2/2012	1:24:34 PM	Bubbler valve closed
8/2/2012	1:24:34 PM	Main Vac valve opened
8/2/2012	1:24:34 PM	Helium MFC set to  0.000000
8/2/2012	1:24:34 PM	H2 MFC set to  0.000000
8/2/2012	1:24:34 PM	BCl3 MFC set to  0.000000
8/2/2012	1:24:34 PM	PH3 MFC set to  0.000000
8/2/2012	1:24:34 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:24:34 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:24:34 PM	Tube furnace set to 150
8/2/2012	1:25:04 PM	H2 valve closed
8/2/2012	1:25:04 PM	BCl3 valve closed
8/2/2012	1:25:04 PM	PH3 valve closed
8/2/2012	1:25:04 PM	SiCl4 pre valve closed
8/2/2012	1:25:04 PM	SiCl4 post valve closed
8/2/2012	1:25:04 PM	Bypass valve closed
8/2/2012	1:25:04 PM	Bubbler valve closed
8/2/2012	1:25:04 PM	Helium valve opened
8/2/2012	1:25:04 PM	Main Vac valve opened
8/2/2012	1:25:04 PM	Helium MFC set to  20.000000
8/2/2012	1:25:04 PM	H2 MFC set to  0.000000
8/2/2012	1:25:04 PM	BCl3 MFC set to  0.000000
8/2/2012	1:25:04 PM	PH3 MFC set to  0.000000
8/2/2012	1:25:04 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:25:04 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:25:04 PM	Tube furnace set to 150
8/2/2012	1:27:04 PM	Helium valve closed
8/2/2012	1:27:04 PM	H2 valve closed
8/2/2012	1:27:04 PM	BCl3 valve closed
8/2/2012	1:27:04 PM	PH3 valve closed
8/2/2012	1:27:04 PM	SiCl4 pre valve closed
8/2/2012	1:27:04 PM	SiCl4 post valve closed
8/2/2012	1:27:04 PM	Bypass valve closed
8/2/2012	1:27:04 PM	Bubbler valve closed
8/2/2012	1:27:04 PM	Main Vac valve opened
8/2/2012	1:27:04 PM	Helium MFC set to  0.000000
8/2/2012	1:27:04 PM	H2 MFC set to  0.000000
8/2/2012	1:27:04 PM	BCl3 MFC set to  0.000000
8/2/2012	1:27:04 PM	PH3 MFC set to  0.000000
8/2/2012	1:27:04 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:27:04 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:27:05 PM	Tube furnace set to 150
8/2/2012	1:27:35 PM	H2 valve closed
8/2/2012	1:27:35 PM	BCl3 valve closed
8/2/2012	1:27:35 PM	PH3 valve closed
8/2/2012	1:27:35 PM	SiCl4 pre valve closed
8/2/2012	1:27:35 PM	SiCl4 post valve closed
8/2/2012	1:27:35 PM	Bypass valve closed
8/2/2012	1:27:35 PM	Bubbler valve closed
8/2/2012	1:27:35 PM	Helium valve opened
8/2/2012	1:27:35 PM	Main Vac valve opened
8/2/2012	1:27:35 PM	Helium MFC set to  20.000000
8/2/2012	1:27:35 PM	H2 MFC set to  0.000000
8/2/2012	1:27:35 PM	BCl3 MFC set to  0.000000
8/2/2012	1:27:35 PM	PH3 MFC set to  0.000000
8/2/2012	1:27:35 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:27:35 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:27:35 PM	Tube furnace set to 150
8/2/2012	1:28:05 PM	Helium valve closed
8/2/2012	1:28:05 PM	H2 valve closed
8/2/2012	1:28:05 PM	BCl3 valve closed
8/2/2012	1:28:05 PM	PH3 valve closed
8/2/2012	1:28:05 PM	SiCl4 pre valve closed
8/2/2012	1:28:05 PM	SiCl4 post valve closed
8/2/2012	1:28:05 PM	Bypass valve closed
8/2/2012	1:28:05 PM	Bubbler valve closed
8/2/2012	1:28:05 PM	Main Vac valve opened
8/2/2012	1:28:05 PM	Helium MFC set to  0.000000
8/2/2012	1:28:05 PM	H2 MFC set to  0.000000
8/2/2012	1:28:05 PM	BCl3 MFC set to  0.000000
8/2/2012	1:28:05 PM	PH3 MFC set to  0.000000
8/2/2012	1:28:05 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:28:05 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:28:05 PM	Tube furnace set to 150
8/2/2012	1:28:35 PM	H2 valve closed
8/2/2012	1:28:35 PM	BCl3 valve closed
8/2/2012	1:28:35 PM	PH3 valve closed
8/2/2012	1:28:35 PM	SiCl4 pre valve closed
8/2/2012	1:28:35 PM	SiCl4 post valve closed
8/2/2012	1:28:35 PM	Bypass valve closed
8/2/2012	1:28:35 PM	Bubbler valve closed
8/2/2012	1:28:35 PM	Helium valve opened
8/2/2012	1:28:35 PM	Main Vac valve opened
8/2/2012	1:28:35 PM	Helium MFC set to  20.000000
8/2/2012	1:28:35 PM	H2 MFC set to  0.000000
8/2/2012	1:28:35 PM	BCl3 MFC set to  0.000000
8/2/2012	1:28:35 PM	PH3 MFC set to  0.000000
8/2/2012	1:28:35 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:28:35 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:28:35 PM	Tube furnace set to 150
8/2/2012	1:29:05 PM	Helium valve closed
8/2/2012	1:29:05 PM	H2 valve closed
8/2/2012	1:29:05 PM	BCl3 valve closed
8/2/2012	1:29:05 PM	PH3 valve closed
8/2/2012	1:29:05 PM	SiCl4 pre valve closed
8/2/2012	1:29:05 PM	SiCl4 post valve closed
8/2/2012	1:29:05 PM	Bypass valve closed
8/2/2012	1:29:05 PM	Bubbler valve closed
8/2/2012	1:29:05 PM	Main Vac valve opened
8/2/2012	1:29:05 PM	Helium MFC set to  0.000000
8/2/2012	1:29:05 PM	H2 MFC set to  0.000000
8/2/2012	1:29:05 PM	BCl3 MFC set to  0.000000
8/2/2012	1:29:05 PM	PH3 MFC set to  0.000000
8/2/2012	1:29:05 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:29:05 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:29:05 PM	Tube furnace set to 150
8/2/2012	1:29:35 PM	H2 valve closed
8/2/2012	1:29:36 PM	BCl3 valve closed
8/2/2012	1:29:36 PM	PH3 valve closed
8/2/2012	1:29:36 PM	SiCl4 pre valve closed
8/2/2012	1:29:36 PM	SiCl4 post valve closed
8/2/2012	1:29:36 PM	Bypass valve closed
8/2/2012	1:29:36 PM	Bubbler valve closed
8/2/2012	1:29:36 PM	Helium valve opened
8/2/2012	1:29:36 PM	Main Vac valve opened
8/2/2012	1:29:36 PM	Helium MFC set to  20.000000
8/2/2012	1:29:36 PM	H2 MFC set to  0.000000
8/2/2012	1:29:36 PM	BCl3 MFC set to  0.000000
8/2/2012	1:29:36 PM	PH3 MFC set to  0.000000
8/2/2012	1:29:36 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:29:36 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:29:36 PM	Tube furnace set to 150
8/2/2012	1:31:36 PM	Helium valve closed
8/2/2012	1:31:36 PM	H2 valve closed
8/2/2012	1:31:36 PM	BCl3 valve closed
8/2/2012	1:31:36 PM	PH3 valve closed
8/2/2012	1:31:36 PM	SiCl4 pre valve closed
8/2/2012	1:31:36 PM	SiCl4 post valve closed
8/2/2012	1:31:36 PM	Bypass valve closed
8/2/2012	1:31:36 PM	Bubbler valve closed
8/2/2012	1:31:36 PM	Main Vac valve opened
8/2/2012	1:31:36 PM	Helium MFC set to  0.000000
8/2/2012	1:31:36 PM	H2 MFC set to  0.000000
8/2/2012	1:31:36 PM	BCl3 MFC set to  0.000000
8/2/2012	1:31:36 PM	PH3 MFC set to  0.000000
8/2/2012	1:31:36 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:31:36 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:31:36 PM	Tube furnace set to 150
8/2/2012	1:32:06 PM	H2 valve closed
8/2/2012	1:32:06 PM	BCl3 valve closed
8/2/2012	1:32:06 PM	PH3 valve closed
8/2/2012	1:32:06 PM	SiCl4 pre valve closed
8/2/2012	1:32:06 PM	SiCl4 post valve closed
8/2/2012	1:32:06 PM	Bypass valve closed
8/2/2012	1:32:06 PM	Bubbler valve closed
8/2/2012	1:32:06 PM	Helium valve opened
8/2/2012	1:32:06 PM	Main Vac valve opened
8/2/2012	1:32:06 PM	Helium MFC set to  20.000000
8/2/2012	1:32:06 PM	H2 MFC set to  0.000000
8/2/2012	1:32:06 PM	BCl3 MFC set to  0.000000
8/2/2012	1:32:06 PM	PH3 MFC set to  0.000000
8/2/2012	1:32:06 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:32:06 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:32:06 PM	Tube furnace set to 150
8/2/2012	1:32:36 PM	Helium valve closed
8/2/2012	1:32:36 PM	H2 valve closed
8/2/2012	1:32:36 PM	BCl3 valve closed
8/2/2012	1:32:36 PM	PH3 valve closed
8/2/2012	1:32:36 PM	SiCl4 pre valve closed
8/2/2012	1:32:36 PM	SiCl4 post valve closed
8/2/2012	1:32:36 PM	Bypass valve closed
8/2/2012	1:32:36 PM	Bubbler valve closed
8/2/2012	1:32:36 PM	Main Vac valve opened
8/2/2012	1:32:36 PM	Helium MFC set to  0.000000
8/2/2012	1:32:36 PM	H2 MFC set to  0.000000
8/2/2012	1:32:36 PM	BCl3 MFC set to  0.000000
8/2/2012	1:32:36 PM	PH3 MFC set to  0.000000
8/2/2012	1:32:36 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:32:36 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:32:36 PM	Tube furnace set to 150
8/2/2012	1:33:06 PM	H2 valve closed
8/2/2012	1:33:06 PM	BCl3 valve closed
8/2/2012	1:33:06 PM	PH3 valve closed
8/2/2012	1:33:06 PM	SiCl4 pre valve closed
8/2/2012	1:33:06 PM	SiCl4 post valve closed
8/2/2012	1:33:06 PM	Bypass valve closed
8/2/2012	1:33:06 PM	Bubbler valve closed
8/2/2012	1:33:06 PM	Helium valve opened
8/2/2012	1:33:06 PM	Main Vac valve opened
8/2/2012	1:33:06 PM	Helium MFC set to  20.000000
8/2/2012	1:33:06 PM	H2 MFC set to  0.000000
8/2/2012	1:33:06 PM	BCl3 MFC set to  0.000000
8/2/2012	1:33:07 PM	PH3 MFC set to  0.000000
8/2/2012	1:33:07 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:33:07 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:33:07 PM	Tube furnace set to 150
8/2/2012	1:35:07 PM	Helium valve closed
8/2/2012	1:35:07 PM	H2 valve closed
8/2/2012	1:35:07 PM	BCl3 valve closed
8/2/2012	1:35:07 PM	PH3 valve closed
8/2/2012	1:35:07 PM	SiCl4 pre valve closed
8/2/2012	1:35:07 PM	SiCl4 post valve closed
8/2/2012	1:35:07 PM	Bypass valve closed
8/2/2012	1:35:07 PM	Bubbler valve closed
8/2/2012	1:35:07 PM	Main Vac valve opened
8/2/2012	1:35:07 PM	Helium MFC set to  0.000000
8/2/2012	1:35:07 PM	H2 MFC set to  0.000000
8/2/2012	1:35:07 PM	BCl3 MFC set to  0.000000
8/2/2012	1:35:07 PM	PH3 MFC set to  0.000000
8/2/2012	1:35:07 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:35:07 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:35:07 PM	Tube furnace set to 150
8/2/2012	1:35:37 PM	H2 valve closed
8/2/2012	1:35:37 PM	BCl3 valve closed
8/2/2012	1:35:37 PM	PH3 valve closed
8/2/2012	1:35:37 PM	SiCl4 pre valve closed
8/2/2012	1:35:37 PM	SiCl4 post valve closed
8/2/2012	1:35:37 PM	Bypass valve closed
8/2/2012	1:35:37 PM	Bubbler valve closed
8/2/2012	1:35:37 PM	Helium valve opened
8/2/2012	1:35:37 PM	Main Vac valve opened
8/2/2012	1:35:37 PM	Helium MFC set to  20.000000
8/2/2012	1:35:37 PM	H2 MFC set to  0.000000
8/2/2012	1:35:37 PM	BCl3 MFC set to  0.000000
8/2/2012	1:35:37 PM	PH3 MFC set to  0.000000
8/2/2012	1:35:37 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:35:37 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:35:37 PM	Tube furnace set to 150
8/2/2012	1:36:07 PM	Helium valve closed
8/2/2012	1:36:07 PM	H2 valve closed
8/2/2012	1:36:07 PM	BCl3 valve closed
8/2/2012	1:36:07 PM	PH3 valve closed
8/2/2012	1:36:07 PM	SiCl4 pre valve closed
8/2/2012	1:36:07 PM	SiCl4 post valve closed
8/2/2012	1:36:07 PM	Bypass valve closed
8/2/2012	1:36:07 PM	Bubbler valve closed
8/2/2012	1:36:07 PM	Main Vac valve opened
8/2/2012	1:36:07 PM	Helium MFC set to  0.000000
8/2/2012	1:36:07 PM	H2 MFC set to  0.000000
8/2/2012	1:36:07 PM	BCl3 MFC set to  0.000000
8/2/2012	1:36:07 PM	PH3 MFC set to  0.000000
8/2/2012	1:36:07 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:36:07 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:36:07 PM	Tube furnace set to 150
8/2/2012	1:36:37 PM	H2 valve closed
8/2/2012	1:36:37 PM	BCl3 valve closed
8/2/2012	1:36:37 PM	PH3 valve closed
8/2/2012	1:36:37 PM	SiCl4 pre valve closed
8/2/2012	1:36:37 PM	SiCl4 post valve closed
8/2/2012	1:36:37 PM	Bypass valve closed
8/2/2012	1:36:37 PM	Bubbler valve closed
8/2/2012	1:36:37 PM	Helium valve opened
8/2/2012	1:36:37 PM	Main Vac valve opened
8/2/2012	1:36:37 PM	Helium MFC set to  20.000000
8/2/2012	1:36:37 PM	H2 MFC set to  0.000000
8/2/2012	1:36:37 PM	BCl3 MFC set to  0.000000
8/2/2012	1:36:37 PM	PH3 MFC set to  0.000000
8/2/2012	1:36:37 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:36:37 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:36:38 PM	Tube furnace set to 150
8/2/2012	1:38:38 PM	Helium valve closed
8/2/2012	1:38:38 PM	H2 valve closed
8/2/2012	1:38:38 PM	BCl3 valve closed
8/2/2012	1:38:38 PM	PH3 valve closed
8/2/2012	1:38:38 PM	SiCl4 pre valve closed
8/2/2012	1:38:38 PM	SiCl4 post valve closed
8/2/2012	1:38:38 PM	Bypass valve closed
8/2/2012	1:38:38 PM	Bubbler valve closed
8/2/2012	1:38:38 PM	Main Vac valve opened
8/2/2012	1:38:38 PM	Helium MFC set to  0.000000
8/2/2012	1:38:38 PM	H2 MFC set to  0.000000
8/2/2012	1:38:38 PM	BCl3 MFC set to  0.000000
8/2/2012	1:38:38 PM	PH3 MFC set to  0.000000
8/2/2012	1:38:38 PM	SiCl4 MFC set to  0.000000
8/2/2012	1:38:38 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	1:38:38 PM	Tube furnace set to 150
8/2/2012	1:38:39 PM	Run finished at 1:38 PM
8/2/2012	2:13:25 PM	Recipe started at 2:13 PM
8/2/2012	2:13:25 PM	Helium valve closed
8/2/2012	2:13:25 PM	H2 valve closed
8/2/2012	2:13:25 PM	BCl3 valve closed
8/2/2012	2:13:25 PM	PH3 valve closed
8/2/2012	2:13:25 PM	SiCl4 pre valve closed
8/2/2012	2:13:25 PM	SiCl4 post valve closed
8/2/2012	2:13:25 PM	Main Vac valve closed
8/2/2012	2:13:26 PM	Bypass valve closed
8/2/2012	2:13:26 PM	Bubbler valve closed
8/2/2012	2:13:26 PM	Helium MFC set to  0.000000
8/2/2012	2:13:26 PM	H2 MFC set to  0.000000
8/2/2012	2:13:26 PM	BCl3 MFC set to  0.000000
8/2/2012	2:13:26 PM	PH3 MFC set to  0.000000
8/2/2012	2:13:26 PM	SiCl4 MFC set to  0.000000
8/2/2012	2:13:26 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	2:13:26 PM	Tube furnace set to 0
8/2/2012	2:13:29 PM	Helium valve closed
8/2/2012	2:13:29 PM	BCl3 valve closed
8/2/2012	2:13:29 PM	PH3 valve closed
8/2/2012	2:13:29 PM	SiCl4 pre valve closed
8/2/2012	2:13:29 PM	SiCl4 post valve closed
8/2/2012	2:13:29 PM	Main Vac valve closed
8/2/2012	2:13:29 PM	Bypass valve closed
8/2/2012	2:13:29 PM	Bubbler valve closed
8/2/2012	2:13:29 PM	H2 valve opened
8/2/2012	2:13:29 PM	Helium MFC set to  0.000000
8/2/2012	2:13:29 PM	H2 MFC set to  500.000000
8/2/2012	2:13:29 PM	BCl3 MFC set to  0.000000
8/2/2012	2:13:29 PM	PH3 MFC set to  0.000000
8/2/2012	2:13:29 PM	SiCl4 MFC set to  0.000000
8/2/2012	2:13:29 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	2:13:29 PM	Tube furnace set to 0
8/2/2012	2:14:39 PM	Helium valve closed
8/2/2012	2:14:39 PM	BCl3 valve closed
8/2/2012	2:14:39 PM	PH3 valve closed
8/2/2012	2:14:39 PM	SiCl4 pre valve closed
8/2/2012	2:14:39 PM	SiCl4 post valve closed
8/2/2012	2:14:39 PM	Main Vac valve closed
8/2/2012	2:14:39 PM	Bypass valve closed
8/2/2012	2:14:39 PM	H2 valve opened
8/2/2012	2:14:39 PM	Bubbler valve opened
8/2/2012	2:14:39 PM	Helium MFC set to  0.000000
8/2/2012	2:14:39 PM	H2 MFC set to  500.000000
8/2/2012	2:14:39 PM	BCl3 MFC set to  0.000000
8/2/2012	2:14:39 PM	PH3 MFC set to  0.000000
8/2/2012	2:14:39 PM	SiCl4 MFC set to  0.000000
8/2/2012	2:14:39 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	2:14:39 PM	Tube furnace set to 0
8/2/2012	2:14:40 PM	Helium valve closed
8/2/2012	2:14:40 PM	BCl3 valve closed
8/2/2012	2:14:40 PM	PH3 valve closed
8/2/2012	2:14:40 PM	SiCl4 pre valve closed
8/2/2012	2:14:40 PM	SiCl4 post valve closed
8/2/2012	2:14:40 PM	Main Vac valve closed
8/2/2012	2:14:40 PM	Bypass valve closed
8/2/2012	2:14:40 PM	H2 valve opened
8/2/2012	2:14:40 PM	Bubbler valve opened
8/2/2012	2:14:40 PM	Helium MFC set to  0.000000
8/2/2012	2:14:40 PM	H2 MFC set to  500.000000
8/2/2012	2:14:40 PM	BCl3 MFC set to  0.000000
8/2/2012	2:14:40 PM	PH3 MFC set to  0.000000
8/2/2012	2:14:40 PM	SiCl4 MFC set to  0.000000
8/2/2012	2:14:40 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	2:14:41 PM	Tube furnace set to 1000
8/2/2012	2:34:41 PM	Helium valve closed
8/2/2012	2:34:41 PM	BCl3 valve closed
8/2/2012	2:34:41 PM	PH3 valve closed
8/2/2012	2:34:41 PM	Main Vac valve closed
8/2/2012	2:34:41 PM	Bypass valve closed
8/2/2012	2:34:41 PM	H2 valve opened
8/2/2012	2:34:41 PM	SiCl4 pre valve opened
8/2/2012	2:34:41 PM	SiCl4 post valve opened
8/2/2012	2:34:41 PM	Bubbler valve opened
8/2/2012	2:34:41 PM	Helium MFC set to  0.000000
8/2/2012	2:34:41 PM	H2 MFC set to  500.000000
8/2/2012	2:34:41 PM	BCl3 MFC set to  0.000000
8/2/2012	2:34:41 PM	PH3 MFC set to  0.000000
8/2/2012	2:34:41 PM	SiCl4 MFC set to  50.000000
8/2/2012	2:34:41 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	2:34:41 PM	Tube furnace set to 1000
8/2/2012	2:44:41 PM	Helium valve closed
8/2/2012	2:44:41 PM	BCl3 valve closed
8/2/2012	2:44:41 PM	PH3 valve closed
8/2/2012	2:44:41 PM	SiCl4 pre valve closed
8/2/2012	2:44:41 PM	SiCl4 post valve closed
8/2/2012	2:44:41 PM	Main Vac valve closed
8/2/2012	2:44:41 PM	Bypass valve closed
8/2/2012	2:44:41 PM	H2 valve opened
8/2/2012	2:44:41 PM	Bubbler valve opened
8/2/2012	2:44:41 PM	Helium MFC set to  0.000000
8/2/2012	2:44:41 PM	H2 MFC set to  500.000000
8/2/2012	2:44:41 PM	BCl3 MFC set to  0.000000
8/2/2012	2:44:41 PM	PH3 MFC set to  0.000000
8/2/2012	2:44:41 PM	SiCl4 MFC set to  0.000000
8/2/2012	2:44:41 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	2:44:41 PM	Tube furnace set to 750
8/2/2012	2:49:41 PM	H2 valve closed
8/2/2012	2:49:41 PM	BCl3 valve closed
8/2/2012	2:49:41 PM	PH3 valve closed
8/2/2012	2:49:41 PM	SiCl4 pre valve closed
8/2/2012	2:49:41 PM	SiCl4 post valve closed
8/2/2012	2:49:41 PM	Main Vac valve closed
8/2/2012	2:49:41 PM	Bypass valve closed
8/2/2012	2:49:41 PM	Helium valve opened
8/2/2012	2:49:41 PM	Bubbler valve opened
8/2/2012	2:49:41 PM	Helium MFC set to  500.000000
8/2/2012	2:49:41 PM	H2 MFC set to  0.000000
8/2/2012	2:49:41 PM	BCl3 MFC set to  0.000000
8/2/2012	2:49:41 PM	PH3 MFC set to  0.000000
8/2/2012	2:49:41 PM	SiCl4 MFC set to  0.000000
8/2/2012	2:49:41 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	2:49:41 PM	Tube furnace set to 0
8/2/2012	3:02:54 PM	Run aborted at 3:02 PM
8/2/2012	3:02:54 PM	Helium valve closed
8/2/2012	3:02:54 PM	H2 valve closed
8/2/2012	3:02:54 PM	BCl3 valve closed
8/2/2012	3:02:54 PM	PH3 valve closed
8/2/2012	3:02:54 PM	SiCl4 pre valve closed
8/2/2012	3:02:54 PM	SiCl4 post valve closed
8/2/2012	3:02:54 PM	Bypass valve closed
8/2/2012	3:02:54 PM	Main Vac valve closed
8/2/2012	3:02:54 PM	Bubbler valve closed
8/2/2012	3:02:54 PM	Helium MFC set to  0.000000
8/2/2012	3:02:54 PM	H2 MFC set to  0.000000
8/2/2012	3:02:54 PM	BCl3 MFC set to  0.000000
8/2/2012	3:02:54 PM	PH3 MFC set to  0.000000
8/2/2012	3:02:54 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:02:54 PM	Tube furnace set to 0
8/2/2012	3:02:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2012	3:02:56 PM	Recipe started at 3:02 PM
8/2/2012	3:02:56 PM	Helium valve closed
8/2/2012	3:02:56 PM	H2 valve closed
8/2/2012	3:02:56 PM	BCl3 valve closed
8/2/2012	3:02:56 PM	PH3 valve closed
8/2/2012	3:02:56 PM	SiCl4 pre valve closed
8/2/2012	3:02:56 PM	SiCl4 post valve closed
8/2/2012	3:02:56 PM	Main Vac valve closed
8/2/2012	3:02:56 PM	Bypass valve closed
8/2/2012	3:02:56 PM	Bubbler valve closed
8/2/2012	3:02:56 PM	Helium MFC set to  0.000000
8/2/2012	3:02:56 PM	H2 MFC set to  0.000000
8/2/2012	3:02:56 PM	BCl3 MFC set to  0.000000
8/2/2012	3:02:56 PM	PH3 MFC set to  0.000000
8/2/2012	3:02:56 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:02:56 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:02:57 PM	Tube furnace set to 0
8/2/2012	3:03:00 PM	H2 valve closed
8/2/2012	3:03:00 PM	BCl3 valve closed
8/2/2012	3:03:00 PM	PH3 valve closed
8/2/2012	3:03:00 PM	SiCl4 pre valve closed
8/2/2012	3:03:00 PM	SiCl4 post valve closed
8/2/2012	3:03:00 PM	Main Vac valve closed
8/2/2012	3:03:00 PM	Bypass valve closed
8/2/2012	3:03:00 PM	Bubbler valve closed
8/2/2012	3:03:00 PM	Helium valve opened
8/2/2012	3:03:00 PM	Helium MFC set to  500.000000
8/2/2012	3:03:00 PM	H2 MFC set to  0.000000
8/2/2012	3:03:00 PM	BCl3 MFC set to  0.000000
8/2/2012	3:03:00 PM	PH3 MFC set to  0.000000
8/2/2012	3:03:00 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:03:00 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:03:00 PM	Tube furnace set to 0
8/2/2012	3:03:00 PM	Helium valve closed
8/2/2012	3:03:00 PM	H2 valve closed
8/2/2012	3:03:00 PM	BCl3 valve closed
8/2/2012	3:03:00 PM	PH3 valve closed
8/2/2012	3:03:00 PM	SiCl4 pre valve closed
8/2/2012	3:03:00 PM	SiCl4 post valve closed
8/2/2012	3:03:00 PM	Main Vac valve closed
8/2/2012	3:03:00 PM	Bypass valve closed
8/2/2012	3:03:00 PM	Bubbler valve closed
8/2/2012	3:03:00 PM	Helium MFC set to  0.000000
8/2/2012	3:03:00 PM	H2 MFC set to  0.000000
8/2/2012	3:03:00 PM	BCl3 MFC set to  0.000000
8/2/2012	3:03:00 PM	PH3 MFC set to  0.000000
8/2/2012	3:03:00 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:03:00 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:03:00 PM	Tube furnace set to 0
8/2/2012	3:03:01 PM	Run finished at 3:03 PM
8/2/2012	3:03:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2012	3:05:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2012	3:05:49 PM	Recipe started at 3:05 PM
8/2/2012	3:05:49 PM	Helium valve closed
8/2/2012	3:05:49 PM	H2 valve closed
8/2/2012	3:05:49 PM	BCl3 valve closed
8/2/2012	3:05:49 PM	PH3 valve closed
8/2/2012	3:05:49 PM	SiCl4 pre valve closed
8/2/2012	3:05:49 PM	SiCl4 post valve closed
8/2/2012	3:05:49 PM	Main Vac valve closed
8/2/2012	3:05:49 PM	Bubbler valve closed
8/2/2012	3:05:49 PM	Bypass valve opened
8/2/2012	3:05:49 PM	Helium MFC set to  0.000000
8/2/2012	3:05:49 PM	H2 MFC set to  0.000000
8/2/2012	3:05:49 PM	BCl3 MFC set to  0.000000
8/2/2012	3:05:49 PM	PH3 MFC set to  0.000000
8/2/2012	3:05:49 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:05:49 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:05:49 PM	Tube furnace set to 0
8/2/2012	3:06:55 PM	Helium valve closed
8/2/2012	3:06:55 PM	H2 valve closed
8/2/2012	3:06:55 PM	BCl3 valve closed
8/2/2012	3:06:55 PM	PH3 valve closed
8/2/2012	3:06:55 PM	SiCl4 pre valve closed
8/2/2012	3:06:55 PM	SiCl4 post valve closed
8/2/2012	3:06:55 PM	Main Vac valve closed
8/2/2012	3:06:55 PM	Bubbler valve closed
8/2/2012	3:06:55 PM	Bypass valve opened
8/2/2012	3:06:55 PM	Helium MFC set to  0.000000
8/2/2012	3:06:55 PM	H2 MFC set to  0.000000
8/2/2012	3:06:55 PM	BCl3 MFC set to  0.000000
8/2/2012	3:06:55 PM	PH3 MFC set to  0.000000
8/2/2012	3:06:55 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:06:55 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:06:55 PM	Tube furnace set to 0
8/2/2012	3:07:55 PM	Helium valve closed
8/2/2012	3:07:55 PM	H2 valve closed
8/2/2012	3:07:55 PM	BCl3 valve closed
8/2/2012	3:07:55 PM	PH3 valve closed
8/2/2012	3:07:55 PM	SiCl4 pre valve closed
8/2/2012	3:07:55 PM	SiCl4 post valve closed
8/2/2012	3:07:55 PM	Bypass valve closed
8/2/2012	3:07:55 PM	Bubbler valve closed
8/2/2012	3:07:55 PM	Main Vac valve opened
8/2/2012	3:07:55 PM	Helium MFC set to  0.000000
8/2/2012	3:07:55 PM	H2 MFC set to  0.000000
8/2/2012	3:07:55 PM	BCl3 MFC set to  0.000000
8/2/2012	3:07:55 PM	PH3 MFC set to  0.000000
8/2/2012	3:07:55 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:07:55 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:07:56 PM	Tube furnace set to 0
8/2/2012	3:07:57 PM	Run finished at 3:07 PM
8/2/2012	3:07:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2012	3:14:25 PM	Recipe started at 3:14 PM
8/2/2012	3:14:25 PM	Helium valve closed
8/2/2012	3:14:25 PM	H2 valve closed
8/2/2012	3:14:25 PM	BCl3 valve closed
8/2/2012	3:14:25 PM	PH3 valve closed
8/2/2012	3:14:25 PM	SiCl4 pre valve closed
8/2/2012	3:14:25 PM	SiCl4 post valve closed
8/2/2012	3:14:25 PM	Bypass valve closed
8/2/2012	3:14:25 PM	Bubbler valve closed
8/2/2012	3:14:25 PM	Main Vac valve opened
8/2/2012	3:14:25 PM	Helium MFC set to  0.000000
8/2/2012	3:14:25 PM	H2 MFC set to  0.000000
8/2/2012	3:14:25 PM	BCl3 MFC set to  0.000000
8/2/2012	3:14:25 PM	PH3 MFC set to  0.000000
8/2/2012	3:14:25 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:14:25 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:14:25 PM	Tube furnace set to 150
8/2/2012	3:14:55 PM	H2 valve closed
8/2/2012	3:14:55 PM	BCl3 valve closed
8/2/2012	3:14:55 PM	PH3 valve closed
8/2/2012	3:14:55 PM	SiCl4 pre valve closed
8/2/2012	3:14:55 PM	SiCl4 post valve closed
8/2/2012	3:14:55 PM	Bypass valve closed
8/2/2012	3:14:55 PM	Bubbler valve closed
8/2/2012	3:14:55 PM	Helium valve opened
8/2/2012	3:14:55 PM	Main Vac valve opened
8/2/2012	3:14:55 PM	Helium MFC set to  20.000000
8/2/2012	3:14:55 PM	H2 MFC set to  0.000000
8/2/2012	3:14:55 PM	BCl3 MFC set to  0.000000
8/2/2012	3:14:55 PM	PH3 MFC set to  0.000000
8/2/2012	3:14:55 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:14:55 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:14:56 PM	Tube furnace set to 150
8/2/2012	3:15:26 PM	Helium valve closed
8/2/2012	3:15:26 PM	H2 valve closed
8/2/2012	3:15:26 PM	BCl3 valve closed
8/2/2012	3:15:26 PM	PH3 valve closed
8/2/2012	3:15:26 PM	SiCl4 pre valve closed
8/2/2012	3:15:26 PM	SiCl4 post valve closed
8/2/2012	3:15:26 PM	Bypass valve closed
8/2/2012	3:15:26 PM	Bubbler valve closed
8/2/2012	3:15:26 PM	Main Vac valve opened
8/2/2012	3:15:26 PM	Helium MFC set to  0.000000
8/2/2012	3:15:26 PM	H2 MFC set to  0.000000
8/2/2012	3:15:26 PM	BCl3 MFC set to  0.000000
8/2/2012	3:15:26 PM	PH3 MFC set to  0.000000
8/2/2012	3:15:26 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:15:26 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:15:26 PM	Tube furnace set to 150
8/2/2012	3:15:56 PM	H2 valve closed
8/2/2012	3:15:56 PM	BCl3 valve closed
8/2/2012	3:15:56 PM	PH3 valve closed
8/2/2012	3:15:56 PM	SiCl4 pre valve closed
8/2/2012	3:15:56 PM	SiCl4 post valve closed
8/2/2012	3:15:56 PM	Bypass valve closed
8/2/2012	3:15:56 PM	Bubbler valve closed
8/2/2012	3:15:56 PM	Helium valve opened
8/2/2012	3:15:56 PM	Main Vac valve opened
8/2/2012	3:15:56 PM	Helium MFC set to  20.000000
8/2/2012	3:15:56 PM	H2 MFC set to  0.000000
8/2/2012	3:15:56 PM	BCl3 MFC set to  0.000000
8/2/2012	3:15:56 PM	PH3 MFC set to  0.000000
8/2/2012	3:15:56 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:15:56 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:15:56 PM	Tube furnace set to 150
8/2/2012	3:16:26 PM	Helium valve closed
8/2/2012	3:16:26 PM	H2 valve closed
8/2/2012	3:16:26 PM	BCl3 valve closed
8/2/2012	3:16:26 PM	PH3 valve closed
8/2/2012	3:16:26 PM	SiCl4 pre valve closed
8/2/2012	3:16:26 PM	SiCl4 post valve closed
8/2/2012	3:16:26 PM	Bypass valve closed
8/2/2012	3:16:26 PM	Bubbler valve closed
8/2/2012	3:16:26 PM	Main Vac valve opened
8/2/2012	3:16:26 PM	Helium MFC set to  0.000000
8/2/2012	3:16:26 PM	H2 MFC set to  0.000000
8/2/2012	3:16:26 PM	BCl3 MFC set to  0.000000
8/2/2012	3:16:26 PM	PH3 MFC set to  0.000000
8/2/2012	3:16:26 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:16:26 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:16:26 PM	Tube furnace set to 150
8/2/2012	3:16:56 PM	H2 valve closed
8/2/2012	3:16:56 PM	BCl3 valve closed
8/2/2012	3:16:56 PM	PH3 valve closed
8/2/2012	3:16:56 PM	SiCl4 pre valve closed
8/2/2012	3:16:56 PM	SiCl4 post valve closed
8/2/2012	3:16:56 PM	Bypass valve closed
8/2/2012	3:16:56 PM	Bubbler valve closed
8/2/2012	3:16:56 PM	Helium valve opened
8/2/2012	3:16:56 PM	Main Vac valve opened
8/2/2012	3:16:56 PM	Helium MFC set to  20.000000
8/2/2012	3:16:56 PM	H2 MFC set to  0.000000
8/2/2012	3:16:56 PM	BCl3 MFC set to  0.000000
8/2/2012	3:16:56 PM	PH3 MFC set to  0.000000
8/2/2012	3:16:56 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:16:56 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:16:56 PM	Tube furnace set to 150
8/2/2012	3:18:56 PM	Helium valve closed
8/2/2012	3:18:56 PM	H2 valve closed
8/2/2012	3:18:56 PM	BCl3 valve closed
8/2/2012	3:18:56 PM	PH3 valve closed
8/2/2012	3:18:56 PM	SiCl4 pre valve closed
8/2/2012	3:18:56 PM	SiCl4 post valve closed
8/2/2012	3:18:56 PM	Bypass valve closed
8/2/2012	3:18:57 PM	Bubbler valve closed
8/2/2012	3:18:57 PM	Main Vac valve opened
8/2/2012	3:18:57 PM	Helium MFC set to  0.000000
8/2/2012	3:18:57 PM	H2 MFC set to  0.000000
8/2/2012	3:18:57 PM	BCl3 MFC set to  0.000000
8/2/2012	3:18:57 PM	PH3 MFC set to  0.000000
8/2/2012	3:18:57 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:18:57 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:18:57 PM	Tube furnace set to 150
8/2/2012	3:19:27 PM	H2 valve closed
8/2/2012	3:19:27 PM	BCl3 valve closed
8/2/2012	3:19:27 PM	PH3 valve closed
8/2/2012	3:19:27 PM	SiCl4 pre valve closed
8/2/2012	3:19:27 PM	SiCl4 post valve closed
8/2/2012	3:19:27 PM	Bypass valve closed
8/2/2012	3:19:27 PM	Bubbler valve closed
8/2/2012	3:19:27 PM	Helium valve opened
8/2/2012	3:19:27 PM	Main Vac valve opened
8/2/2012	3:19:27 PM	Helium MFC set to  20.000000
8/2/2012	3:19:27 PM	H2 MFC set to  0.000000
8/2/2012	3:19:27 PM	BCl3 MFC set to  0.000000
8/2/2012	3:19:27 PM	PH3 MFC set to  0.000000
8/2/2012	3:19:27 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:19:27 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:19:27 PM	Tube furnace set to 150
8/2/2012	3:19:57 PM	Helium valve closed
8/2/2012	3:19:57 PM	H2 valve closed
8/2/2012	3:19:57 PM	BCl3 valve closed
8/2/2012	3:19:57 PM	PH3 valve closed
8/2/2012	3:19:57 PM	SiCl4 pre valve closed
8/2/2012	3:19:57 PM	SiCl4 post valve closed
8/2/2012	3:19:57 PM	Bypass valve closed
8/2/2012	3:19:57 PM	Bubbler valve closed
8/2/2012	3:19:57 PM	Main Vac valve opened
8/2/2012	3:19:57 PM	Helium MFC set to  0.000000
8/2/2012	3:19:57 PM	H2 MFC set to  0.000000
8/2/2012	3:19:57 PM	BCl3 MFC set to  0.000000
8/2/2012	3:19:57 PM	PH3 MFC set to  0.000000
8/2/2012	3:19:57 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:19:57 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:19:57 PM	Tube furnace set to 150
8/2/2012	3:20:27 PM	H2 valve closed
8/2/2012	3:20:27 PM	BCl3 valve closed
8/2/2012	3:20:27 PM	PH3 valve closed
8/2/2012	3:20:27 PM	SiCl4 pre valve closed
8/2/2012	3:20:27 PM	SiCl4 post valve closed
8/2/2012	3:20:27 PM	Bypass valve closed
8/2/2012	3:20:27 PM	Bubbler valve closed
8/2/2012	3:20:27 PM	Helium valve opened
8/2/2012	3:20:27 PM	Main Vac valve opened
8/2/2012	3:20:27 PM	Helium MFC set to  20.000000
8/2/2012	3:20:27 PM	H2 MFC set to  0.000000
8/2/2012	3:20:27 PM	BCl3 MFC set to  0.000000
8/2/2012	3:20:27 PM	PH3 MFC set to  0.000000
8/2/2012	3:20:27 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:20:27 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:20:27 PM	Tube furnace set to 150
8/2/2012	3:20:57 PM	Helium valve closed
8/2/2012	3:20:57 PM	H2 valve closed
8/2/2012	3:20:57 PM	BCl3 valve closed
8/2/2012	3:20:57 PM	PH3 valve closed
8/2/2012	3:20:57 PM	SiCl4 pre valve closed
8/2/2012	3:20:57 PM	SiCl4 post valve closed
8/2/2012	3:20:57 PM	Bypass valve closed
8/2/2012	3:20:57 PM	Bubbler valve closed
8/2/2012	3:20:57 PM	Main Vac valve opened
8/2/2012	3:20:57 PM	Helium MFC set to  0.000000
8/2/2012	3:20:57 PM	H2 MFC set to  0.000000
8/2/2012	3:20:57 PM	BCl3 MFC set to  0.000000
8/2/2012	3:20:57 PM	PH3 MFC set to  0.000000
8/2/2012	3:20:57 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:20:57 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:20:58 PM	Tube furnace set to 150
8/2/2012	3:21:28 PM	H2 valve closed
8/2/2012	3:21:28 PM	BCl3 valve closed
8/2/2012	3:21:28 PM	PH3 valve closed
8/2/2012	3:21:28 PM	SiCl4 pre valve closed
8/2/2012	3:21:28 PM	SiCl4 post valve closed
8/2/2012	3:21:28 PM	Bypass valve closed
8/2/2012	3:21:28 PM	Bubbler valve closed
8/2/2012	3:21:28 PM	Helium valve opened
8/2/2012	3:21:28 PM	Main Vac valve opened
8/2/2012	3:21:28 PM	Helium MFC set to  20.000000
8/2/2012	3:21:28 PM	H2 MFC set to  0.000000
8/2/2012	3:21:28 PM	BCl3 MFC set to  0.000000
8/2/2012	3:21:28 PM	PH3 MFC set to  0.000000
8/2/2012	3:21:28 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:21:28 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:21:28 PM	Tube furnace set to 150
8/2/2012	3:23:28 PM	Helium valve closed
8/2/2012	3:23:28 PM	H2 valve closed
8/2/2012	3:23:28 PM	BCl3 valve closed
8/2/2012	3:23:28 PM	PH3 valve closed
8/2/2012	3:23:28 PM	SiCl4 pre valve closed
8/2/2012	3:23:28 PM	SiCl4 post valve closed
8/2/2012	3:23:28 PM	Bypass valve closed
8/2/2012	3:23:28 PM	Bubbler valve closed
8/2/2012	3:23:28 PM	Main Vac valve opened
8/2/2012	3:23:28 PM	Helium MFC set to  0.000000
8/2/2012	3:23:28 PM	H2 MFC set to  0.000000
8/2/2012	3:23:28 PM	BCl3 MFC set to  0.000000
8/2/2012	3:23:28 PM	PH3 MFC set to  0.000000
8/2/2012	3:23:28 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:23:28 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:23:28 PM	Tube furnace set to 150
8/2/2012	3:23:58 PM	H2 valve closed
8/2/2012	3:23:58 PM	BCl3 valve closed
8/2/2012	3:23:58 PM	PH3 valve closed
8/2/2012	3:23:58 PM	SiCl4 pre valve closed
8/2/2012	3:23:58 PM	SiCl4 post valve closed
8/2/2012	3:23:58 PM	Bypass valve closed
8/2/2012	3:23:58 PM	Bubbler valve closed
8/2/2012	3:23:58 PM	Helium valve opened
8/2/2012	3:23:58 PM	Main Vac valve opened
8/2/2012	3:23:58 PM	Helium MFC set to  20.000000
8/2/2012	3:23:58 PM	H2 MFC set to  0.000000
8/2/2012	3:23:58 PM	BCl3 MFC set to  0.000000
8/2/2012	3:23:58 PM	PH3 MFC set to  0.000000
8/2/2012	3:23:58 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:23:58 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:23:58 PM	Tube furnace set to 150
8/2/2012	3:24:28 PM	Helium valve closed
8/2/2012	3:24:28 PM	H2 valve closed
8/2/2012	3:24:28 PM	BCl3 valve closed
8/2/2012	3:24:28 PM	PH3 valve closed
8/2/2012	3:24:28 PM	SiCl4 pre valve closed
8/2/2012	3:24:28 PM	SiCl4 post valve closed
8/2/2012	3:24:28 PM	Bypass valve closed
8/2/2012	3:24:28 PM	Bubbler valve closed
8/2/2012	3:24:28 PM	Main Vac valve opened
8/2/2012	3:24:28 PM	Helium MFC set to  0.000000
8/2/2012	3:24:28 PM	H2 MFC set to  0.000000
8/2/2012	3:24:28 PM	BCl3 MFC set to  0.000000
8/2/2012	3:24:28 PM	PH3 MFC set to  0.000000
8/2/2012	3:24:28 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:24:28 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:24:29 PM	Tube furnace set to 150
8/2/2012	3:24:59 PM	H2 valve closed
8/2/2012	3:24:59 PM	BCl3 valve closed
8/2/2012	3:24:59 PM	PH3 valve closed
8/2/2012	3:24:59 PM	SiCl4 pre valve closed
8/2/2012	3:24:59 PM	SiCl4 post valve closed
8/2/2012	3:24:59 PM	Bypass valve closed
8/2/2012	3:24:59 PM	Bubbler valve closed
8/2/2012	3:24:59 PM	Helium valve opened
8/2/2012	3:24:59 PM	Main Vac valve opened
8/2/2012	3:24:59 PM	Helium MFC set to  20.000000
8/2/2012	3:24:59 PM	H2 MFC set to  0.000000
8/2/2012	3:24:59 PM	BCl3 MFC set to  0.000000
8/2/2012	3:24:59 PM	PH3 MFC set to  0.000000
8/2/2012	3:24:59 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:24:59 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:24:59 PM	Tube furnace set to 150
8/2/2012	3:26:59 PM	Helium valve closed
8/2/2012	3:26:59 PM	H2 valve closed
8/2/2012	3:26:59 PM	BCl3 valve closed
8/2/2012	3:26:59 PM	PH3 valve closed
8/2/2012	3:26:59 PM	SiCl4 pre valve closed
8/2/2012	3:26:59 PM	SiCl4 post valve closed
8/2/2012	3:26:59 PM	Bypass valve closed
8/2/2012	3:26:59 PM	Bubbler valve closed
8/2/2012	3:26:59 PM	Main Vac valve opened
8/2/2012	3:26:59 PM	Helium MFC set to  0.000000
8/2/2012	3:26:59 PM	H2 MFC set to  0.000000
8/2/2012	3:26:59 PM	BCl3 MFC set to  0.000000
8/2/2012	3:26:59 PM	PH3 MFC set to  0.000000
8/2/2012	3:26:59 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:26:59 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:26:59 PM	Tube furnace set to 150
8/2/2012	3:27:29 PM	H2 valve closed
8/2/2012	3:27:29 PM	BCl3 valve closed
8/2/2012	3:27:29 PM	PH3 valve closed
8/2/2012	3:27:29 PM	SiCl4 pre valve closed
8/2/2012	3:27:29 PM	SiCl4 post valve closed
8/2/2012	3:27:29 PM	Bypass valve closed
8/2/2012	3:27:29 PM	Bubbler valve closed
8/2/2012	3:27:29 PM	Helium valve opened
8/2/2012	3:27:29 PM	Main Vac valve opened
8/2/2012	3:27:29 PM	Helium MFC set to  20.000000
8/2/2012	3:27:29 PM	H2 MFC set to  0.000000
8/2/2012	3:27:29 PM	BCl3 MFC set to  0.000000
8/2/2012	3:27:29 PM	PH3 MFC set to  0.000000
8/2/2012	3:27:29 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:27:29 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:27:29 PM	Tube furnace set to 150
8/2/2012	3:27:59 PM	Helium valve closed
8/2/2012	3:27:59 PM	H2 valve closed
8/2/2012	3:27:59 PM	BCl3 valve closed
8/2/2012	3:27:59 PM	PH3 valve closed
8/2/2012	3:27:59 PM	SiCl4 pre valve closed
8/2/2012	3:27:59 PM	SiCl4 post valve closed
8/2/2012	3:27:59 PM	Bypass valve closed
8/2/2012	3:27:59 PM	Bubbler valve closed
8/2/2012	3:27:59 PM	Main Vac valve opened
8/2/2012	3:27:59 PM	Helium MFC set to  0.000000
8/2/2012	3:27:59 PM	H2 MFC set to  0.000000
8/2/2012	3:27:59 PM	BCl3 MFC set to  0.000000
8/2/2012	3:27:59 PM	PH3 MFC set to  0.000000
8/2/2012	3:27:59 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:27:59 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:28:00 PM	Tube furnace set to 150
8/2/2012	3:28:30 PM	H2 valve closed
8/2/2012	3:28:30 PM	BCl3 valve closed
8/2/2012	3:28:30 PM	PH3 valve closed
8/2/2012	3:28:30 PM	SiCl4 pre valve closed
8/2/2012	3:28:30 PM	SiCl4 post valve closed
8/2/2012	3:28:30 PM	Bypass valve closed
8/2/2012	3:28:30 PM	Bubbler valve closed
8/2/2012	3:28:30 PM	Helium valve opened
8/2/2012	3:28:30 PM	Main Vac valve opened
8/2/2012	3:28:30 PM	Helium MFC set to  20.000000
8/2/2012	3:28:30 PM	H2 MFC set to  0.000000
8/2/2012	3:28:30 PM	BCl3 MFC set to  0.000000
8/2/2012	3:28:30 PM	PH3 MFC set to  0.000000
8/2/2012	3:28:30 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:28:30 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:28:30 PM	Tube furnace set to 150
8/2/2012	3:30:30 PM	Helium valve closed
8/2/2012	3:30:30 PM	H2 valve closed
8/2/2012	3:30:30 PM	BCl3 valve closed
8/2/2012	3:30:30 PM	PH3 valve closed
8/2/2012	3:30:30 PM	SiCl4 pre valve closed
8/2/2012	3:30:30 PM	SiCl4 post valve closed
8/2/2012	3:30:30 PM	Bypass valve closed
8/2/2012	3:30:30 PM	Bubbler valve closed
8/2/2012	3:30:30 PM	Main Vac valve opened
8/2/2012	3:30:30 PM	Helium MFC set to  0.000000
8/2/2012	3:30:30 PM	H2 MFC set to  0.000000
8/2/2012	3:30:30 PM	BCl3 MFC set to  0.000000
8/2/2012	3:30:30 PM	PH3 MFC set to  0.000000
8/2/2012	3:30:30 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:30:30 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:30:30 PM	Tube furnace set to 150
8/2/2012	3:30:31 PM	Run finished at 3:30 PM
8/2/2012	3:31:26 PM	Recipe started at 3:31 PM
8/2/2012	3:31:26 PM	Helium valve closed
8/2/2012	3:31:26 PM	H2 valve closed
8/2/2012	3:31:26 PM	BCl3 valve closed
8/2/2012	3:31:26 PM	PH3 valve closed
8/2/2012	3:31:26 PM	SiCl4 pre valve closed
8/2/2012	3:31:26 PM	SiCl4 post valve closed
8/2/2012	3:31:26 PM	Bypass valve closed
8/2/2012	3:31:26 PM	Bubbler valve closed
8/2/2012	3:31:26 PM	Main Vac valve opened
8/2/2012	3:31:26 PM	Helium MFC set to  0.000000
8/2/2012	3:31:26 PM	H2 MFC set to  0.000000
8/2/2012	3:31:26 PM	BCl3 MFC set to  0.000000
8/2/2012	3:31:26 PM	PH3 MFC set to  0.000000
8/2/2012	3:31:26 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:31:26 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:31:27 PM	Tube furnace set to 150
8/2/2012	3:31:57 PM	H2 valve closed
8/2/2012	3:31:57 PM	BCl3 valve closed
8/2/2012	3:31:57 PM	PH3 valve closed
8/2/2012	3:31:57 PM	SiCl4 pre valve closed
8/2/2012	3:31:57 PM	SiCl4 post valve closed
8/2/2012	3:31:57 PM	Bypass valve closed
8/2/2012	3:31:57 PM	Bubbler valve closed
8/2/2012	3:31:57 PM	Helium valve opened
8/2/2012	3:31:57 PM	Main Vac valve opened
8/2/2012	3:31:57 PM	Helium MFC set to  20.000000
8/2/2012	3:31:57 PM	H2 MFC set to  0.000000
8/2/2012	3:31:57 PM	BCl3 MFC set to  0.000000
8/2/2012	3:31:57 PM	PH3 MFC set to  0.000000
8/2/2012	3:31:57 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:31:57 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:31:57 PM	Tube furnace set to 150
8/2/2012	3:32:27 PM	Helium valve closed
8/2/2012	3:32:27 PM	H2 valve closed
8/2/2012	3:32:27 PM	BCl3 valve closed
8/2/2012	3:32:27 PM	PH3 valve closed
8/2/2012	3:32:27 PM	SiCl4 pre valve closed
8/2/2012	3:32:27 PM	SiCl4 post valve closed
8/2/2012	3:32:27 PM	Bypass valve closed
8/2/2012	3:32:27 PM	Bubbler valve closed
8/2/2012	3:32:27 PM	Main Vac valve opened
8/2/2012	3:32:27 PM	Helium MFC set to  0.000000
8/2/2012	3:32:27 PM	H2 MFC set to  0.000000
8/2/2012	3:32:27 PM	BCl3 MFC set to  0.000000
8/2/2012	3:32:27 PM	PH3 MFC set to  0.000000
8/2/2012	3:32:27 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:32:27 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:32:27 PM	Tube furnace set to 150
8/2/2012	3:32:57 PM	H2 valve closed
8/2/2012	3:32:57 PM	BCl3 valve closed
8/2/2012	3:32:57 PM	PH3 valve closed
8/2/2012	3:32:57 PM	SiCl4 pre valve closed
8/2/2012	3:32:57 PM	SiCl4 post valve closed
8/2/2012	3:32:57 PM	Bypass valve closed
8/2/2012	3:32:57 PM	Bubbler valve closed
8/2/2012	3:32:57 PM	Helium valve opened
8/2/2012	3:32:57 PM	Main Vac valve opened
8/2/2012	3:32:57 PM	Helium MFC set to  20.000000
8/2/2012	3:32:57 PM	H2 MFC set to  0.000000
8/2/2012	3:32:57 PM	BCl3 MFC set to  0.000000
8/2/2012	3:32:57 PM	PH3 MFC set to  0.000000
8/2/2012	3:32:57 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:32:57 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:32:57 PM	Tube furnace set to 150
8/2/2012	3:33:27 PM	Helium valve closed
8/2/2012	3:33:27 PM	H2 valve closed
8/2/2012	3:33:27 PM	BCl3 valve closed
8/2/2012	3:33:27 PM	PH3 valve closed
8/2/2012	3:33:27 PM	SiCl4 pre valve closed
8/2/2012	3:33:27 PM	SiCl4 post valve closed
8/2/2012	3:33:27 PM	Bypass valve closed
8/2/2012	3:33:27 PM	Bubbler valve closed
8/2/2012	3:33:27 PM	Main Vac valve opened
8/2/2012	3:33:27 PM	Helium MFC set to  0.000000
8/2/2012	3:33:27 PM	H2 MFC set to  0.000000
8/2/2012	3:33:27 PM	BCl3 MFC set to  0.000000
8/2/2012	3:33:27 PM	PH3 MFC set to  0.000000
8/2/2012	3:33:27 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:33:27 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:33:28 PM	Tube furnace set to 150
8/2/2012	3:33:58 PM	H2 valve closed
8/2/2012	3:33:58 PM	BCl3 valve closed
8/2/2012	3:33:58 PM	PH3 valve closed
8/2/2012	3:33:58 PM	SiCl4 pre valve closed
8/2/2012	3:33:58 PM	SiCl4 post valve closed
8/2/2012	3:33:58 PM	Bypass valve closed
8/2/2012	3:33:58 PM	Bubbler valve closed
8/2/2012	3:33:58 PM	Helium valve opened
8/2/2012	3:33:58 PM	Main Vac valve opened
8/2/2012	3:33:58 PM	Helium MFC set to  20.000000
8/2/2012	3:33:58 PM	H2 MFC set to  0.000000
8/2/2012	3:33:58 PM	BCl3 MFC set to  0.000000
8/2/2012	3:33:58 PM	PH3 MFC set to  0.000000
8/2/2012	3:33:58 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:33:58 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:33:58 PM	Tube furnace set to 150
8/2/2012	3:35:58 PM	Helium valve closed
8/2/2012	3:35:58 PM	H2 valve closed
8/2/2012	3:35:58 PM	BCl3 valve closed
8/2/2012	3:35:58 PM	PH3 valve closed
8/2/2012	3:35:58 PM	SiCl4 pre valve closed
8/2/2012	3:35:58 PM	SiCl4 post valve closed
8/2/2012	3:35:58 PM	Bypass valve closed
8/2/2012	3:35:58 PM	Bubbler valve closed
8/2/2012	3:35:58 PM	Main Vac valve opened
8/2/2012	3:35:58 PM	Helium MFC set to  0.000000
8/2/2012	3:35:58 PM	H2 MFC set to  0.000000
8/2/2012	3:35:58 PM	BCl3 MFC set to  0.000000
8/2/2012	3:35:58 PM	PH3 MFC set to  0.000000
8/2/2012	3:35:58 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:35:58 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:35:58 PM	Tube furnace set to 150
8/2/2012	3:36:28 PM	H2 valve closed
8/2/2012	3:36:28 PM	BCl3 valve closed
8/2/2012	3:36:28 PM	PH3 valve closed
8/2/2012	3:36:28 PM	SiCl4 pre valve closed
8/2/2012	3:36:28 PM	SiCl4 post valve closed
8/2/2012	3:36:28 PM	Bypass valve closed
8/2/2012	3:36:28 PM	Bubbler valve closed
8/2/2012	3:36:28 PM	Helium valve opened
8/2/2012	3:36:28 PM	Main Vac valve opened
8/2/2012	3:36:28 PM	Helium MFC set to  20.000000
8/2/2012	3:36:28 PM	H2 MFC set to  0.000000
8/2/2012	3:36:28 PM	BCl3 MFC set to  0.000000
8/2/2012	3:36:28 PM	PH3 MFC set to  0.000000
8/2/2012	3:36:28 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:36:28 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:36:28 PM	Tube furnace set to 150
8/2/2012	3:36:58 PM	Helium valve closed
8/2/2012	3:36:58 PM	H2 valve closed
8/2/2012	3:36:58 PM	BCl3 valve closed
8/2/2012	3:36:58 PM	PH3 valve closed
8/2/2012	3:36:58 PM	SiCl4 pre valve closed
8/2/2012	3:36:58 PM	SiCl4 post valve closed
8/2/2012	3:36:58 PM	Bypass valve closed
8/2/2012	3:36:58 PM	Bubbler valve closed
8/2/2012	3:36:58 PM	Main Vac valve opened
8/2/2012	3:36:58 PM	Helium MFC set to  0.000000
8/2/2012	3:36:58 PM	H2 MFC set to  0.000000
8/2/2012	3:36:58 PM	BCl3 MFC set to  0.000000
8/2/2012	3:36:58 PM	PH3 MFC set to  0.000000
8/2/2012	3:36:58 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:36:58 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:36:59 PM	Tube furnace set to 150
8/2/2012	3:37:29 PM	H2 valve closed
8/2/2012	3:37:29 PM	BCl3 valve closed
8/2/2012	3:37:29 PM	PH3 valve closed
8/2/2012	3:37:29 PM	SiCl4 pre valve closed
8/2/2012	3:37:29 PM	SiCl4 post valve closed
8/2/2012	3:37:29 PM	Bypass valve closed
8/2/2012	3:37:29 PM	Bubbler valve closed
8/2/2012	3:37:29 PM	Helium valve opened
8/2/2012	3:37:29 PM	Main Vac valve opened
8/2/2012	3:37:29 PM	Helium MFC set to  20.000000
8/2/2012	3:37:29 PM	H2 MFC set to  0.000000
8/2/2012	3:37:29 PM	BCl3 MFC set to  0.000000
8/2/2012	3:37:29 PM	PH3 MFC set to  0.000000
8/2/2012	3:37:29 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:37:29 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:37:29 PM	Tube furnace set to 150
8/2/2012	3:37:59 PM	Helium valve closed
8/2/2012	3:37:59 PM	H2 valve closed
8/2/2012	3:37:59 PM	BCl3 valve closed
8/2/2012	3:37:59 PM	PH3 valve closed
8/2/2012	3:37:59 PM	SiCl4 pre valve closed
8/2/2012	3:37:59 PM	SiCl4 post valve closed
8/2/2012	3:37:59 PM	Bypass valve closed
8/2/2012	3:37:59 PM	Bubbler valve closed
8/2/2012	3:37:59 PM	Main Vac valve opened
8/2/2012	3:37:59 PM	Helium MFC set to  0.000000
8/2/2012	3:37:59 PM	H2 MFC set to  0.000000
8/2/2012	3:37:59 PM	BCl3 MFC set to  0.000000
8/2/2012	3:37:59 PM	PH3 MFC set to  0.000000
8/2/2012	3:37:59 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:37:59 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:37:59 PM	Tube furnace set to 150
8/2/2012	3:38:29 PM	H2 valve closed
8/2/2012	3:38:29 PM	BCl3 valve closed
8/2/2012	3:38:29 PM	PH3 valve closed
8/2/2012	3:38:29 PM	SiCl4 pre valve closed
8/2/2012	3:38:29 PM	SiCl4 post valve closed
8/2/2012	3:38:29 PM	Bypass valve closed
8/2/2012	3:38:29 PM	Bubbler valve closed
8/2/2012	3:38:29 PM	Helium valve opened
8/2/2012	3:38:29 PM	Main Vac valve opened
8/2/2012	3:38:29 PM	Helium MFC set to  20.000000
8/2/2012	3:38:29 PM	H2 MFC set to  0.000000
8/2/2012	3:38:29 PM	BCl3 MFC set to  0.000000
8/2/2012	3:38:29 PM	PH3 MFC set to  0.000000
8/2/2012	3:38:29 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:38:29 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:38:29 PM	Tube furnace set to 150
8/2/2012	3:40:29 PM	Helium valve closed
8/2/2012	3:40:29 PM	H2 valve closed
8/2/2012	3:40:29 PM	BCl3 valve closed
8/2/2012	3:40:29 PM	PH3 valve closed
8/2/2012	3:40:29 PM	SiCl4 pre valve closed
8/2/2012	3:40:29 PM	SiCl4 post valve closed
8/2/2012	3:40:29 PM	Bypass valve closed
8/2/2012	3:40:29 PM	Bubbler valve closed
8/2/2012	3:40:29 PM	Main Vac valve opened
8/2/2012	3:40:29 PM	Helium MFC set to  0.000000
8/2/2012	3:40:29 PM	H2 MFC set to  0.000000
8/2/2012	3:40:29 PM	BCl3 MFC set to  0.000000
8/2/2012	3:40:29 PM	PH3 MFC set to  0.000000
8/2/2012	3:40:29 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:40:29 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:40:29 PM	Tube furnace set to 150
8/2/2012	3:40:59 PM	H2 valve closed
8/2/2012	3:40:59 PM	BCl3 valve closed
8/2/2012	3:40:59 PM	PH3 valve closed
8/2/2012	3:40:59 PM	SiCl4 pre valve closed
8/2/2012	3:40:59 PM	SiCl4 post valve closed
8/2/2012	3:40:59 PM	Bypass valve closed
8/2/2012	3:40:59 PM	Bubbler valve closed
8/2/2012	3:40:59 PM	Helium valve opened
8/2/2012	3:41:00 PM	Main Vac valve opened
8/2/2012	3:41:00 PM	Helium MFC set to  20.000000
8/2/2012	3:41:00 PM	H2 MFC set to  0.000000
8/2/2012	3:41:00 PM	BCl3 MFC set to  0.000000
8/2/2012	3:41:00 PM	PH3 MFC set to  0.000000
8/2/2012	3:41:00 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:41:00 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:41:00 PM	Tube furnace set to 150
8/2/2012	3:41:30 PM	Helium valve closed
8/2/2012	3:41:30 PM	H2 valve closed
8/2/2012	3:41:30 PM	BCl3 valve closed
8/2/2012	3:41:30 PM	PH3 valve closed
8/2/2012	3:41:30 PM	SiCl4 pre valve closed
8/2/2012	3:41:30 PM	SiCl4 post valve closed
8/2/2012	3:41:30 PM	Bypass valve closed
8/2/2012	3:41:30 PM	Bubbler valve closed
8/2/2012	3:41:30 PM	Main Vac valve opened
8/2/2012	3:41:30 PM	Helium MFC set to  0.000000
8/2/2012	3:41:30 PM	H2 MFC set to  0.000000
8/2/2012	3:41:30 PM	BCl3 MFC set to  0.000000
8/2/2012	3:41:30 PM	PH3 MFC set to  0.000000
8/2/2012	3:41:30 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:41:30 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:41:30 PM	Tube furnace set to 150
8/2/2012	3:42:00 PM	H2 valve closed
8/2/2012	3:42:00 PM	BCl3 valve closed
8/2/2012	3:42:00 PM	PH3 valve closed
8/2/2012	3:42:00 PM	SiCl4 pre valve closed
8/2/2012	3:42:00 PM	SiCl4 post valve closed
8/2/2012	3:42:00 PM	Bypass valve closed
8/2/2012	3:42:00 PM	Bubbler valve closed
8/2/2012	3:42:00 PM	Helium valve opened
8/2/2012	3:42:00 PM	Main Vac valve opened
8/2/2012	3:42:00 PM	Helium MFC set to  20.000000
8/2/2012	3:42:00 PM	H2 MFC set to  0.000000
8/2/2012	3:42:00 PM	BCl3 MFC set to  0.000000
8/2/2012	3:42:00 PM	PH3 MFC set to  0.000000
8/2/2012	3:42:00 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:42:00 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:42:00 PM	Tube furnace set to 150
8/2/2012	3:44:00 PM	Helium valve closed
8/2/2012	3:44:00 PM	H2 valve closed
8/2/2012	3:44:00 PM	BCl3 valve closed
8/2/2012	3:44:00 PM	PH3 valve closed
8/2/2012	3:44:00 PM	SiCl4 pre valve closed
8/2/2012	3:44:00 PM	SiCl4 post valve closed
8/2/2012	3:44:00 PM	Bypass valve closed
8/2/2012	3:44:00 PM	Bubbler valve closed
8/2/2012	3:44:00 PM	Main Vac valve opened
8/2/2012	3:44:00 PM	Helium MFC set to  0.000000
8/2/2012	3:44:00 PM	H2 MFC set to  0.000000
8/2/2012	3:44:00 PM	BCl3 MFC set to  0.000000
8/2/2012	3:44:00 PM	PH3 MFC set to  0.000000
8/2/2012	3:44:00 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:44:00 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:44:00 PM	Tube furnace set to 150
8/2/2012	3:44:30 PM	H2 valve closed
8/2/2012	3:44:30 PM	BCl3 valve closed
8/2/2012	3:44:30 PM	PH3 valve closed
8/2/2012	3:44:30 PM	SiCl4 pre valve closed
8/2/2012	3:44:30 PM	SiCl4 post valve closed
8/2/2012	3:44:30 PM	Bypass valve closed
8/2/2012	3:44:30 PM	Bubbler valve closed
8/2/2012	3:44:30 PM	Helium valve opened
8/2/2012	3:44:30 PM	Main Vac valve opened
8/2/2012	3:44:30 PM	Helium MFC set to  20.000000
8/2/2012	3:44:30 PM	H2 MFC set to  0.000000
8/2/2012	3:44:30 PM	BCl3 MFC set to  0.000000
8/2/2012	3:44:30 PM	PH3 MFC set to  0.000000
8/2/2012	3:44:30 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:44:30 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:44:31 PM	Tube furnace set to 150
8/2/2012	3:45:01 PM	Helium valve closed
8/2/2012	3:45:01 PM	H2 valve closed
8/2/2012	3:45:01 PM	BCl3 valve closed
8/2/2012	3:45:01 PM	PH3 valve closed
8/2/2012	3:45:01 PM	SiCl4 pre valve closed
8/2/2012	3:45:01 PM	SiCl4 post valve closed
8/2/2012	3:45:01 PM	Bypass valve closed
8/2/2012	3:45:01 PM	Bubbler valve closed
8/2/2012	3:45:01 PM	Main Vac valve opened
8/2/2012	3:45:01 PM	Helium MFC set to  0.000000
8/2/2012	3:45:01 PM	H2 MFC set to  0.000000
8/2/2012	3:45:01 PM	BCl3 MFC set to  0.000000
8/2/2012	3:45:01 PM	PH3 MFC set to  0.000000
8/2/2012	3:45:01 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:45:01 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:45:01 PM	Tube furnace set to 150
8/2/2012	3:45:31 PM	H2 valve closed
8/2/2012	3:45:31 PM	BCl3 valve closed
8/2/2012	3:45:31 PM	PH3 valve closed
8/2/2012	3:45:31 PM	SiCl4 pre valve closed
8/2/2012	3:45:31 PM	SiCl4 post valve closed
8/2/2012	3:45:31 PM	Bypass valve closed
8/2/2012	3:45:31 PM	Bubbler valve closed
8/2/2012	3:45:31 PM	Helium valve opened
8/2/2012	3:45:31 PM	Main Vac valve opened
8/2/2012	3:45:31 PM	Helium MFC set to  20.000000
8/2/2012	3:45:31 PM	H2 MFC set to  0.000000
8/2/2012	3:45:31 PM	BCl3 MFC set to  0.000000
8/2/2012	3:45:31 PM	PH3 MFC set to  0.000000
8/2/2012	3:45:31 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:45:31 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:45:31 PM	Tube furnace set to 150
8/2/2012	3:47:31 PM	Helium valve closed
8/2/2012	3:47:31 PM	H2 valve closed
8/2/2012	3:47:31 PM	BCl3 valve closed
8/2/2012	3:47:31 PM	PH3 valve closed
8/2/2012	3:47:31 PM	SiCl4 pre valve closed
8/2/2012	3:47:31 PM	SiCl4 post valve closed
8/2/2012	3:47:31 PM	Bypass valve closed
8/2/2012	3:47:31 PM	Bubbler valve closed
8/2/2012	3:47:31 PM	Main Vac valve opened
8/2/2012	3:47:31 PM	Helium MFC set to  0.000000
8/2/2012	3:47:31 PM	H2 MFC set to  0.000000
8/2/2012	3:47:31 PM	BCl3 MFC set to  0.000000
8/2/2012	3:47:31 PM	PH3 MFC set to  0.000000
8/2/2012	3:47:31 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:47:31 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:47:31 PM	Tube furnace set to 150
8/2/2012	3:47:32 PM	Run finished at 3:47 PM
8/2/2012	3:48:30 PM	Recipe started at 3:48 PM
8/2/2012	3:48:30 PM	Helium valve closed
8/2/2012	3:48:31 PM	H2 valve closed
8/2/2012	3:48:31 PM	BCl3 valve closed
8/2/2012	3:48:31 PM	PH3 valve closed
8/2/2012	3:48:31 PM	SiCl4 pre valve closed
8/2/2012	3:48:31 PM	SiCl4 post valve closed
8/2/2012	3:48:31 PM	Main Vac valve closed
8/2/2012	3:48:31 PM	Bypass valve closed
8/2/2012	3:48:31 PM	Bubbler valve closed
8/2/2012	3:48:31 PM	Helium MFC set to  0.000000
8/2/2012	3:48:31 PM	H2 MFC set to  0.000000
8/2/2012	3:48:31 PM	BCl3 MFC set to  0.000000
8/2/2012	3:48:31 PM	PH3 MFC set to  0.000000
8/2/2012	3:48:31 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:48:31 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:48:31 PM	Tube furnace set to 0
8/2/2012	3:48:34 PM	Helium valve closed
8/2/2012	3:48:34 PM	BCl3 valve closed
8/2/2012	3:48:34 PM	PH3 valve closed
8/2/2012	3:48:34 PM	SiCl4 pre valve closed
8/2/2012	3:48:34 PM	SiCl4 post valve closed
8/2/2012	3:48:34 PM	Main Vac valve closed
8/2/2012	3:48:34 PM	Bypass valve closed
8/2/2012	3:48:34 PM	Bubbler valve closed
8/2/2012	3:48:34 PM	H2 valve opened
8/2/2012	3:48:34 PM	Helium MFC set to  0.000000
8/2/2012	3:48:34 PM	H2 MFC set to  500.000000
8/2/2012	3:48:34 PM	BCl3 MFC set to  0.000000
8/2/2012	3:48:34 PM	PH3 MFC set to  0.000000
8/2/2012	3:48:34 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:48:34 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:48:34 PM	Tube furnace set to 0
8/2/2012	3:49:43 PM	Helium valve closed
8/2/2012	3:49:43 PM	BCl3 valve closed
8/2/2012	3:49:44 PM	PH3 valve closed
8/2/2012	3:49:44 PM	SiCl4 pre valve closed
8/2/2012	3:49:44 PM	SiCl4 post valve closed
8/2/2012	3:49:44 PM	Main Vac valve closed
8/2/2012	3:49:44 PM	Bypass valve closed
8/2/2012	3:49:44 PM	H2 valve opened
8/2/2012	3:49:44 PM	Bubbler valve opened
8/2/2012	3:49:44 PM	Helium MFC set to  0.000000
8/2/2012	3:49:44 PM	H2 MFC set to  500.000000
8/2/2012	3:49:44 PM	BCl3 MFC set to  0.000000
8/2/2012	3:49:44 PM	PH3 MFC set to  0.000000
8/2/2012	3:49:44 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:49:44 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:49:44 PM	Tube furnace set to 0
8/2/2012	3:49:45 PM	Helium valve closed
8/2/2012	3:49:45 PM	BCl3 valve closed
8/2/2012	3:49:45 PM	PH3 valve closed
8/2/2012	3:49:45 PM	SiCl4 pre valve closed
8/2/2012	3:49:45 PM	SiCl4 post valve closed
8/2/2012	3:49:45 PM	Main Vac valve closed
8/2/2012	3:49:45 PM	Bypass valve closed
8/2/2012	3:49:45 PM	H2 valve opened
8/2/2012	3:49:45 PM	Bubbler valve opened
8/2/2012	3:49:45 PM	Helium MFC set to  0.000000
8/2/2012	3:49:45 PM	H2 MFC set to  500.000000
8/2/2012	3:49:45 PM	BCl3 MFC set to  0.000000
8/2/2012	3:49:45 PM	PH3 MFC set to  0.000000
8/2/2012	3:49:45 PM	SiCl4 MFC set to  0.000000
8/2/2012	3:49:45 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	3:49:45 PM	Tube furnace set to 1000
8/2/2012	4:09:45 PM	Helium valve closed
8/2/2012	4:09:45 PM	BCl3 valve closed
8/2/2012	4:09:45 PM	PH3 valve closed
8/2/2012	4:09:45 PM	Main Vac valve closed
8/2/2012	4:09:45 PM	Bypass valve closed
8/2/2012	4:09:45 PM	H2 valve opened
8/2/2012	4:09:45 PM	SiCl4 pre valve opened
8/2/2012	4:09:45 PM	SiCl4 post valve opened
8/2/2012	4:09:45 PM	Bubbler valve opened
8/2/2012	4:09:45 PM	Helium MFC set to  0.000000
8/2/2012	4:09:45 PM	H2 MFC set to  500.000000
8/2/2012	4:09:45 PM	BCl3 MFC set to  0.000000
8/2/2012	4:09:45 PM	PH3 MFC set to  0.000000
8/2/2012	4:09:45 PM	SiCl4 MFC set to  50.000000
8/2/2012	4:09:45 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:09:45 PM	Tube furnace set to 1000
8/2/2012	4:19:45 PM	Helium valve closed
8/2/2012	4:19:45 PM	BCl3 valve closed
8/2/2012	4:19:45 PM	PH3 valve closed
8/2/2012	4:19:45 PM	SiCl4 pre valve closed
8/2/2012	4:19:45 PM	SiCl4 post valve closed
8/2/2012	4:19:45 PM	Main Vac valve closed
8/2/2012	4:19:45 PM	Bypass valve closed
8/2/2012	4:19:45 PM	H2 valve opened
8/2/2012	4:19:45 PM	Bubbler valve opened
8/2/2012	4:19:45 PM	Helium MFC set to  0.000000
8/2/2012	4:19:45 PM	H2 MFC set to  500.000000
8/2/2012	4:19:45 PM	BCl3 MFC set to  0.000000
8/2/2012	4:19:45 PM	PH3 MFC set to  0.000000
8/2/2012	4:19:45 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:19:45 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:19:45 PM	Tube furnace set to 750
8/2/2012	4:24:45 PM	H2 valve closed
8/2/2012	4:24:45 PM	BCl3 valve closed
8/2/2012	4:24:45 PM	PH3 valve closed
8/2/2012	4:24:45 PM	SiCl4 pre valve closed
8/2/2012	4:24:45 PM	SiCl4 post valve closed
8/2/2012	4:24:45 PM	Main Vac valve closed
8/2/2012	4:24:45 PM	Bypass valve closed
8/2/2012	4:24:45 PM	Helium valve opened
8/2/2012	4:24:45 PM	Bubbler valve opened
8/2/2012	4:24:45 PM	Helium MFC set to  500.000000
8/2/2012	4:24:45 PM	H2 MFC set to  0.000000
8/2/2012	4:24:45 PM	BCl3 MFC set to  0.000000
8/2/2012	4:24:45 PM	PH3 MFC set to  0.000000
8/2/2012	4:24:46 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:24:46 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:24:46 PM	Tube furnace set to 0
8/2/2012	4:28:26 PM	Run aborted at 4:28 PM
8/2/2012	4:28:26 PM	Helium valve closed
8/2/2012	4:28:26 PM	H2 valve closed
8/2/2012	4:28:26 PM	BCl3 valve closed
8/2/2012	4:28:26 PM	PH3 valve closed
8/2/2012	4:28:26 PM	SiCl4 pre valve closed
8/2/2012	4:28:26 PM	SiCl4 post valve closed
8/2/2012	4:28:26 PM	Bypass valve closed
8/2/2012	4:28:26 PM	Main Vac valve closed
8/2/2012	4:28:26 PM	Bubbler valve closed
8/2/2012	4:28:26 PM	Helium MFC set to  0.000000
8/2/2012	4:28:26 PM	H2 MFC set to  0.000000
8/2/2012	4:28:26 PM	BCl3 MFC set to  0.000000
8/2/2012	4:28:26 PM	PH3 MFC set to  0.000000
8/2/2012	4:28:26 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:28:27 PM	Tube furnace set to 0
8/2/2012	4:28:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2012	4:28:29 PM	Recipe started at 4:28 PM
8/2/2012	4:28:29 PM	Helium valve closed
8/2/2012	4:28:29 PM	H2 valve closed
8/2/2012	4:28:29 PM	BCl3 valve closed
8/2/2012	4:28:29 PM	PH3 valve closed
8/2/2012	4:28:29 PM	SiCl4 pre valve closed
8/2/2012	4:28:29 PM	SiCl4 post valve closed
8/2/2012	4:28:29 PM	Main Vac valve closed
8/2/2012	4:28:29 PM	Bypass valve closed
8/2/2012	4:28:29 PM	Bubbler valve closed
8/2/2012	4:28:29 PM	Helium MFC set to  0.000000
8/2/2012	4:28:29 PM	H2 MFC set to  0.000000
8/2/2012	4:28:29 PM	BCl3 MFC set to  0.000000
8/2/2012	4:28:29 PM	PH3 MFC set to  0.000000
8/2/2012	4:28:29 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:28:29 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:28:29 PM	Tube furnace set to 0
8/2/2012	4:28:32 PM	H2 valve closed
8/2/2012	4:28:32 PM	BCl3 valve closed
8/2/2012	4:28:32 PM	PH3 valve closed
8/2/2012	4:28:32 PM	SiCl4 pre valve closed
8/2/2012	4:28:32 PM	SiCl4 post valve closed
8/2/2012	4:28:32 PM	Main Vac valve closed
8/2/2012	4:28:32 PM	Bypass valve closed
8/2/2012	4:28:32 PM	Bubbler valve closed
8/2/2012	4:28:32 PM	Helium valve opened
8/2/2012	4:28:32 PM	Helium MFC set to  500.000000
8/2/2012	4:28:32 PM	H2 MFC set to  0.000000
8/2/2012	4:28:32 PM	BCl3 MFC set to  0.000000
8/2/2012	4:28:32 PM	PH3 MFC set to  0.000000
8/2/2012	4:28:32 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:28:32 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:28:32 PM	Tube furnace set to 0
8/2/2012	4:28:32 PM	Helium valve closed
8/2/2012	4:28:32 PM	H2 valve closed
8/2/2012	4:28:32 PM	BCl3 valve closed
8/2/2012	4:28:32 PM	PH3 valve closed
8/2/2012	4:28:32 PM	SiCl4 pre valve closed
8/2/2012	4:28:32 PM	SiCl4 post valve closed
8/2/2012	4:28:32 PM	Main Vac valve closed
8/2/2012	4:28:32 PM	Bypass valve closed
8/2/2012	4:28:32 PM	Bubbler valve closed
8/2/2012	4:28:32 PM	Helium MFC set to  0.000000
8/2/2012	4:28:32 PM	H2 MFC set to  0.000000
8/2/2012	4:28:32 PM	BCl3 MFC set to  0.000000
8/2/2012	4:28:32 PM	PH3 MFC set to  0.000000
8/2/2012	4:28:32 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:28:32 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:28:33 PM	Tube furnace set to 0
8/2/2012	4:28:34 PM	Run finished at 4:28 PM
8/2/2012	4:28:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2012	4:30:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2012	4:30:04 PM	Recipe started at 4:30 PM
8/2/2012	4:30:04 PM	Helium valve closed
8/2/2012	4:30:04 PM	H2 valve closed
8/2/2012	4:30:04 PM	BCl3 valve closed
8/2/2012	4:30:04 PM	PH3 valve closed
8/2/2012	4:30:04 PM	SiCl4 pre valve closed
8/2/2012	4:30:04 PM	SiCl4 post valve closed
8/2/2012	4:30:04 PM	Main Vac valve closed
8/2/2012	4:30:04 PM	Bubbler valve closed
8/2/2012	4:30:04 PM	Bypass valve opened
8/2/2012	4:30:04 PM	Helium MFC set to  0.000000
8/2/2012	4:30:04 PM	H2 MFC set to  0.000000
8/2/2012	4:30:04 PM	BCl3 MFC set to  0.000000
8/2/2012	4:30:04 PM	PH3 MFC set to  0.000000
8/2/2012	4:30:04 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:30:04 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:30:04 PM	Tube furnace set to 0
8/2/2012	4:31:13 PM	Helium valve closed
8/2/2012	4:31:13 PM	H2 valve closed
8/2/2012	4:31:13 PM	BCl3 valve closed
8/2/2012	4:31:13 PM	PH3 valve closed
8/2/2012	4:31:13 PM	SiCl4 pre valve closed
8/2/2012	4:31:13 PM	SiCl4 post valve closed
8/2/2012	4:31:13 PM	Main Vac valve closed
8/2/2012	4:31:13 PM	Bubbler valve closed
8/2/2012	4:31:13 PM	Bypass valve opened
8/2/2012	4:31:13 PM	Helium MFC set to  0.000000
8/2/2012	4:31:13 PM	H2 MFC set to  0.000000
8/2/2012	4:31:13 PM	BCl3 MFC set to  0.000000
8/2/2012	4:31:13 PM	PH3 MFC set to  0.000000
8/2/2012	4:31:13 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:31:13 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:31:14 PM	Tube furnace set to 0
8/2/2012	4:32:14 PM	Helium valve closed
8/2/2012	4:32:14 PM	H2 valve closed
8/2/2012	4:32:14 PM	BCl3 valve closed
8/2/2012	4:32:14 PM	PH3 valve closed
8/2/2012	4:32:14 PM	SiCl4 pre valve closed
8/2/2012	4:32:14 PM	SiCl4 post valve closed
8/2/2012	4:32:14 PM	Bypass valve closed
8/2/2012	4:32:14 PM	Bubbler valve closed
8/2/2012	4:32:14 PM	Main Vac valve opened
8/2/2012	4:32:14 PM	Helium MFC set to  0.000000
8/2/2012	4:32:14 PM	H2 MFC set to  0.000000
8/2/2012	4:32:14 PM	BCl3 MFC set to  0.000000
8/2/2012	4:32:14 PM	PH3 MFC set to  0.000000
8/2/2012	4:32:14 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:32:14 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:32:14 PM	Tube furnace set to 0
8/2/2012	4:32:15 PM	Run finished at 4:32 PM
8/2/2012	4:32:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2012	4:39:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2012	4:39:22 PM	Recipe started at 4:39 PM
8/2/2012	4:39:22 PM	Helium valve closed
8/2/2012	4:39:22 PM	H2 valve closed
8/2/2012	4:39:22 PM	BCl3 valve closed
8/2/2012	4:39:22 PM	PH3 valve closed
8/2/2012	4:39:22 PM	SiCl4 pre valve closed
8/2/2012	4:39:22 PM	SiCl4 post valve closed
8/2/2012	4:39:22 PM	Main Vac valve closed
8/2/2012	4:39:22 PM	Bypass valve closed
8/2/2012	4:39:22 PM	Bubbler valve closed
8/2/2012	4:39:22 PM	Helium MFC set to  0.000000
8/2/2012	4:39:22 PM	H2 MFC set to  0.000000
8/2/2012	4:39:22 PM	BCl3 MFC set to  0.000000
8/2/2012	4:39:22 PM	PH3 MFC set to  0.000000
8/2/2012	4:39:22 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:39:22 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:39:22 PM	Tube furnace set to 0
8/2/2012	4:39:24 PM	Run aborted at 4:39 PM
8/2/2012	4:39:24 PM	Helium valve closed
8/2/2012	4:39:24 PM	H2 valve closed
8/2/2012	4:39:24 PM	BCl3 valve closed
8/2/2012	4:39:24 PM	PH3 valve closed
8/2/2012	4:39:24 PM	SiCl4 pre valve closed
8/2/2012	4:39:24 PM	SiCl4 post valve closed
8/2/2012	4:39:24 PM	Bypass valve closed
8/2/2012	4:39:24 PM	Main Vac valve closed
8/2/2012	4:39:24 PM	Bubbler valve closed
8/2/2012	4:39:24 PM	Helium MFC set to  0.000000
8/2/2012	4:39:24 PM	H2 MFC set to  0.000000
8/2/2012	4:39:24 PM	BCl3 MFC set to  0.000000
8/2/2012	4:39:24 PM	PH3 MFC set to  0.000000
8/2/2012	4:39:24 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:39:24 PM	Tube furnace set to 0
8/2/2012	4:39:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2012	4:39:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2012	4:39:27 PM	Recipe started at 4:39 PM
8/2/2012	4:39:27 PM	Helium valve closed
8/2/2012	4:39:27 PM	H2 valve closed
8/2/2012	4:39:27 PM	BCl3 valve closed
8/2/2012	4:39:27 PM	PH3 valve closed
8/2/2012	4:39:27 PM	SiCl4 pre valve closed
8/2/2012	4:39:27 PM	SiCl4 post valve closed
8/2/2012	4:39:27 PM	Main Vac valve closed
8/2/2012	4:39:27 PM	Bubbler valve closed
8/2/2012	4:39:27 PM	Bypass valve opened
8/2/2012	4:39:27 PM	Helium MFC set to  0.000000
8/2/2012	4:39:27 PM	H2 MFC set to  0.000000
8/2/2012	4:39:27 PM	BCl3 MFC set to  0.000000
8/2/2012	4:39:27 PM	PH3 MFC set to  0.000000
8/2/2012	4:39:27 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:39:27 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:39:27 PM	Tube furnace set to 0
8/2/2012	4:39:27 PM	Helium valve closed
8/2/2012	4:39:27 PM	H2 valve closed
8/2/2012	4:39:27 PM	BCl3 valve closed
8/2/2012	4:39:27 PM	PH3 valve closed
8/2/2012	4:39:27 PM	SiCl4 pre valve closed
8/2/2012	4:39:27 PM	SiCl4 post valve closed
8/2/2012	4:39:27 PM	Main Vac valve closed
8/2/2012	4:39:27 PM	Bubbler valve closed
8/2/2012	4:39:27 PM	Bypass valve opened
8/2/2012	4:39:27 PM	Helium MFC set to  0.000000
8/2/2012	4:39:27 PM	H2 MFC set to  0.000000
8/2/2012	4:39:27 PM	BCl3 MFC set to  0.000000
8/2/2012	4:39:27 PM	PH3 MFC set to  0.000000
8/2/2012	4:39:27 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:39:27 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:39:28 PM	Tube furnace set to 0
8/2/2012	4:40:00 PM	Helium valve closed
8/2/2012	4:40:00 PM	H2 valve closed
8/2/2012	4:40:00 PM	BCl3 valve closed
8/2/2012	4:40:00 PM	PH3 valve closed
8/2/2012	4:40:00 PM	SiCl4 pre valve closed
8/2/2012	4:40:00 PM	SiCl4 post valve closed
8/2/2012	4:40:00 PM	Bypass valve closed
8/2/2012	4:40:00 PM	Bubbler valve closed
8/2/2012	4:40:00 PM	Main Vac valve opened
8/2/2012	4:40:00 PM	Helium MFC set to  0.000000
8/2/2012	4:40:00 PM	H2 MFC set to  0.000000
8/2/2012	4:40:00 PM	BCl3 MFC set to  0.000000
8/2/2012	4:40:00 PM	PH3 MFC set to  0.000000
8/2/2012	4:40:00 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:40:00 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:40:00 PM	Tube furnace set to 0
8/2/2012	4:40:01 PM	Run finished at 4:40 PM
8/2/2012	4:40:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2012	4:40:24 PM	Recipe started at 4:40 PM
8/2/2012	4:40:24 PM	Helium valve closed
8/2/2012	4:40:24 PM	H2 valve closed
8/2/2012	4:40:24 PM	BCl3 valve closed
8/2/2012	4:40:24 PM	PH3 valve closed
8/2/2012	4:40:24 PM	SiCl4 pre valve closed
8/2/2012	4:40:24 PM	SiCl4 post valve closed
8/2/2012	4:40:24 PM	Bypass valve closed
8/2/2012	4:40:24 PM	Bubbler valve closed
8/2/2012	4:40:24 PM	Main Vac valve opened
8/2/2012	4:40:24 PM	Helium MFC set to  0.000000
8/2/2012	4:40:24 PM	H2 MFC set to  0.000000
8/2/2012	4:40:24 PM	BCl3 MFC set to  0.000000
8/2/2012	4:40:24 PM	PH3 MFC set to  0.000000
8/2/2012	4:40:24 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:40:24 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:40:25 PM	Tube furnace set to 150
8/2/2012	4:40:55 PM	H2 valve closed
8/2/2012	4:40:55 PM	BCl3 valve closed
8/2/2012	4:40:55 PM	PH3 valve closed
8/2/2012	4:40:55 PM	SiCl4 pre valve closed
8/2/2012	4:40:55 PM	SiCl4 post valve closed
8/2/2012	4:40:55 PM	Bypass valve closed
8/2/2012	4:40:55 PM	Bubbler valve closed
8/2/2012	4:40:55 PM	Helium valve opened
8/2/2012	4:40:55 PM	Main Vac valve opened
8/2/2012	4:40:55 PM	Helium MFC set to  20.000000
8/2/2012	4:40:55 PM	H2 MFC set to  0.000000
8/2/2012	4:40:55 PM	BCl3 MFC set to  0.000000
8/2/2012	4:40:55 PM	PH3 MFC set to  0.000000
8/2/2012	4:40:55 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:40:55 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:40:55 PM	Tube furnace set to 150
8/2/2012	4:41:25 PM	Helium valve closed
8/2/2012	4:41:25 PM	H2 valve closed
8/2/2012	4:41:25 PM	BCl3 valve closed
8/2/2012	4:41:25 PM	PH3 valve closed
8/2/2012	4:41:25 PM	SiCl4 pre valve closed
8/2/2012	4:41:25 PM	SiCl4 post valve closed
8/2/2012	4:41:25 PM	Bypass valve closed
8/2/2012	4:41:25 PM	Bubbler valve closed
8/2/2012	4:41:25 PM	Main Vac valve opened
8/2/2012	4:41:25 PM	Helium MFC set to  0.000000
8/2/2012	4:41:25 PM	H2 MFC set to  0.000000
8/2/2012	4:41:25 PM	BCl3 MFC set to  0.000000
8/2/2012	4:41:25 PM	PH3 MFC set to  0.000000
8/2/2012	4:41:25 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:41:25 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:41:25 PM	Tube furnace set to 150
8/2/2012	4:41:55 PM	H2 valve closed
8/2/2012	4:41:55 PM	BCl3 valve closed
8/2/2012	4:41:55 PM	PH3 valve closed
8/2/2012	4:41:55 PM	SiCl4 pre valve closed
8/2/2012	4:41:55 PM	SiCl4 post valve closed
8/2/2012	4:41:55 PM	Bypass valve closed
8/2/2012	4:41:55 PM	Bubbler valve closed
8/2/2012	4:41:55 PM	Helium valve opened
8/2/2012	4:41:55 PM	Main Vac valve opened
8/2/2012	4:41:55 PM	Helium MFC set to  20.000000
8/2/2012	4:41:55 PM	H2 MFC set to  0.000000
8/2/2012	4:41:55 PM	BCl3 MFC set to  0.000000
8/2/2012	4:41:55 PM	PH3 MFC set to  0.000000
8/2/2012	4:41:55 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:41:55 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:41:55 PM	Tube furnace set to 150
8/2/2012	4:42:25 PM	Helium valve closed
8/2/2012	4:42:25 PM	H2 valve closed
8/2/2012	4:42:25 PM	BCl3 valve closed
8/2/2012	4:42:25 PM	PH3 valve closed
8/2/2012	4:42:25 PM	SiCl4 pre valve closed
8/2/2012	4:42:25 PM	SiCl4 post valve closed
8/2/2012	4:42:25 PM	Bypass valve closed
8/2/2012	4:42:25 PM	Bubbler valve closed
8/2/2012	4:42:25 PM	Main Vac valve opened
8/2/2012	4:42:25 PM	Helium MFC set to  0.000000
8/2/2012	4:42:25 PM	H2 MFC set to  0.000000
8/2/2012	4:42:25 PM	BCl3 MFC set to  0.000000
8/2/2012	4:42:25 PM	PH3 MFC set to  0.000000
8/2/2012	4:42:25 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:42:25 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:42:25 PM	Tube furnace set to 150
8/2/2012	4:42:55 PM	H2 valve closed
8/2/2012	4:42:55 PM	BCl3 valve closed
8/2/2012	4:42:56 PM	PH3 valve closed
8/2/2012	4:42:56 PM	SiCl4 pre valve closed
8/2/2012	4:42:56 PM	SiCl4 post valve closed
8/2/2012	4:42:56 PM	Bypass valve closed
8/2/2012	4:42:56 PM	Bubbler valve closed
8/2/2012	4:42:56 PM	Helium valve opened
8/2/2012	4:42:56 PM	Main Vac valve opened
8/2/2012	4:42:56 PM	Helium MFC set to  20.000000
8/2/2012	4:42:56 PM	H2 MFC set to  0.000000
8/2/2012	4:42:56 PM	BCl3 MFC set to  0.000000
8/2/2012	4:42:56 PM	PH3 MFC set to  0.000000
8/2/2012	4:42:56 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:42:56 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:42:56 PM	Tube furnace set to 150
8/2/2012	4:44:56 PM	Helium valve closed
8/2/2012	4:44:56 PM	H2 valve closed
8/2/2012	4:44:56 PM	BCl3 valve closed
8/2/2012	4:44:56 PM	PH3 valve closed
8/2/2012	4:44:56 PM	SiCl4 pre valve closed
8/2/2012	4:44:56 PM	SiCl4 post valve closed
8/2/2012	4:44:56 PM	Bypass valve closed
8/2/2012	4:44:56 PM	Bubbler valve closed
8/2/2012	4:44:56 PM	Main Vac valve opened
8/2/2012	4:44:56 PM	Helium MFC set to  0.000000
8/2/2012	4:44:56 PM	H2 MFC set to  0.000000
8/2/2012	4:44:56 PM	BCl3 MFC set to  0.000000
8/2/2012	4:44:56 PM	PH3 MFC set to  0.000000
8/2/2012	4:44:56 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:44:56 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:44:56 PM	Tube furnace set to 150
8/2/2012	4:45:26 PM	H2 valve closed
8/2/2012	4:45:26 PM	BCl3 valve closed
8/2/2012	4:45:26 PM	PH3 valve closed
8/2/2012	4:45:26 PM	SiCl4 pre valve closed
8/2/2012	4:45:26 PM	SiCl4 post valve closed
8/2/2012	4:45:26 PM	Bypass valve closed
8/2/2012	4:45:26 PM	Bubbler valve closed
8/2/2012	4:45:26 PM	Helium valve opened
8/2/2012	4:45:26 PM	Main Vac valve opened
8/2/2012	4:45:26 PM	Helium MFC set to  20.000000
8/2/2012	4:45:26 PM	H2 MFC set to  0.000000
8/2/2012	4:45:26 PM	BCl3 MFC set to  0.000000
8/2/2012	4:45:26 PM	PH3 MFC set to  0.000000
8/2/2012	4:45:26 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:45:26 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:45:26 PM	Tube furnace set to 150
8/2/2012	4:45:56 PM	Helium valve closed
8/2/2012	4:45:56 PM	H2 valve closed
8/2/2012	4:45:56 PM	BCl3 valve closed
8/2/2012	4:45:56 PM	PH3 valve closed
8/2/2012	4:45:56 PM	SiCl4 pre valve closed
8/2/2012	4:45:56 PM	SiCl4 post valve closed
8/2/2012	4:45:56 PM	Bypass valve closed
8/2/2012	4:45:56 PM	Bubbler valve closed
8/2/2012	4:45:56 PM	Main Vac valve opened
8/2/2012	4:45:56 PM	Helium MFC set to  0.000000
8/2/2012	4:45:56 PM	H2 MFC set to  0.000000
8/2/2012	4:45:56 PM	BCl3 MFC set to  0.000000
8/2/2012	4:45:56 PM	PH3 MFC set to  0.000000
8/2/2012	4:45:56 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:45:56 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:45:56 PM	Tube furnace set to 150
8/2/2012	4:46:26 PM	H2 valve closed
8/2/2012	4:46:26 PM	BCl3 valve closed
8/2/2012	4:46:26 PM	PH3 valve closed
8/2/2012	4:46:26 PM	SiCl4 pre valve closed
8/2/2012	4:46:26 PM	SiCl4 post valve closed
8/2/2012	4:46:26 PM	Bypass valve closed
8/2/2012	4:46:26 PM	Bubbler valve closed
8/2/2012	4:46:26 PM	Helium valve opened
8/2/2012	4:46:26 PM	Main Vac valve opened
8/2/2012	4:46:26 PM	Helium MFC set to  20.000000
8/2/2012	4:46:26 PM	H2 MFC set to  0.000000
8/2/2012	4:46:26 PM	BCl3 MFC set to  0.000000
8/2/2012	4:46:26 PM	PH3 MFC set to  0.000000
8/2/2012	4:46:26 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:46:26 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:46:27 PM	Tube furnace set to 150
8/2/2012	4:46:57 PM	Helium valve closed
8/2/2012	4:46:57 PM	H2 valve closed
8/2/2012	4:46:57 PM	BCl3 valve closed
8/2/2012	4:46:57 PM	PH3 valve closed
8/2/2012	4:46:57 PM	SiCl4 pre valve closed
8/2/2012	4:46:57 PM	SiCl4 post valve closed
8/2/2012	4:46:57 PM	Bypass valve closed
8/2/2012	4:46:57 PM	Bubbler valve closed
8/2/2012	4:46:57 PM	Main Vac valve opened
8/2/2012	4:46:57 PM	Helium MFC set to  0.000000
8/2/2012	4:46:57 PM	H2 MFC set to  0.000000
8/2/2012	4:46:57 PM	BCl3 MFC set to  0.000000
8/2/2012	4:46:57 PM	PH3 MFC set to  0.000000
8/2/2012	4:46:57 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:46:57 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:46:57 PM	Tube furnace set to 150
8/2/2012	4:47:27 PM	H2 valve closed
8/2/2012	4:47:27 PM	BCl3 valve closed
8/2/2012	4:47:27 PM	PH3 valve closed
8/2/2012	4:47:27 PM	SiCl4 pre valve closed
8/2/2012	4:47:27 PM	SiCl4 post valve closed
8/2/2012	4:47:27 PM	Bypass valve closed
8/2/2012	4:47:27 PM	Bubbler valve closed
8/2/2012	4:47:27 PM	Helium valve opened
8/2/2012	4:47:27 PM	Main Vac valve opened
8/2/2012	4:47:27 PM	Helium MFC set to  20.000000
8/2/2012	4:47:27 PM	H2 MFC set to  0.000000
8/2/2012	4:47:27 PM	BCl3 MFC set to  0.000000
8/2/2012	4:47:27 PM	PH3 MFC set to  0.000000
8/2/2012	4:47:27 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:47:27 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:47:27 PM	Tube furnace set to 150
8/2/2012	4:49:27 PM	Helium valve closed
8/2/2012	4:49:27 PM	H2 valve closed
8/2/2012	4:49:27 PM	BCl3 valve closed
8/2/2012	4:49:27 PM	PH3 valve closed
8/2/2012	4:49:27 PM	SiCl4 pre valve closed
8/2/2012	4:49:27 PM	SiCl4 post valve closed
8/2/2012	4:49:27 PM	Bypass valve closed
8/2/2012	4:49:27 PM	Bubbler valve closed
8/2/2012	4:49:27 PM	Main Vac valve opened
8/2/2012	4:49:27 PM	Helium MFC set to  0.000000
8/2/2012	4:49:27 PM	H2 MFC set to  0.000000
8/2/2012	4:49:27 PM	BCl3 MFC set to  0.000000
8/2/2012	4:49:27 PM	PH3 MFC set to  0.000000
8/2/2012	4:49:27 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:49:27 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:49:27 PM	Tube furnace set to 150
8/2/2012	4:49:57 PM	H2 valve closed
8/2/2012	4:49:57 PM	BCl3 valve closed
8/2/2012	4:49:57 PM	PH3 valve closed
8/2/2012	4:49:57 PM	SiCl4 pre valve closed
8/2/2012	4:49:57 PM	SiCl4 post valve closed
8/2/2012	4:49:57 PM	Bypass valve closed
8/2/2012	4:49:57 PM	Bubbler valve closed
8/2/2012	4:49:57 PM	Helium valve opened
8/2/2012	4:49:57 PM	Main Vac valve opened
8/2/2012	4:49:57 PM	Helium MFC set to  20.000000
8/2/2012	4:49:57 PM	H2 MFC set to  0.000000
8/2/2012	4:49:57 PM	BCl3 MFC set to  0.000000
8/2/2012	4:49:57 PM	PH3 MFC set to  0.000000
8/2/2012	4:49:57 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:49:57 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:49:58 PM	Tube furnace set to 150
8/2/2012	4:50:28 PM	Helium valve closed
8/2/2012	4:50:28 PM	H2 valve closed
8/2/2012	4:50:28 PM	BCl3 valve closed
8/2/2012	4:50:28 PM	PH3 valve closed
8/2/2012	4:50:28 PM	SiCl4 pre valve closed
8/2/2012	4:50:28 PM	SiCl4 post valve closed
8/2/2012	4:50:28 PM	Bypass valve closed
8/2/2012	4:50:28 PM	Bubbler valve closed
8/2/2012	4:50:28 PM	Main Vac valve opened
8/2/2012	4:50:28 PM	Helium MFC set to  0.000000
8/2/2012	4:50:28 PM	H2 MFC set to  0.000000
8/2/2012	4:50:28 PM	BCl3 MFC set to  0.000000
8/2/2012	4:50:28 PM	PH3 MFC set to  0.000000
8/2/2012	4:50:28 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:50:28 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:50:28 PM	Tube furnace set to 150
8/2/2012	4:50:58 PM	H2 valve closed
8/2/2012	4:50:58 PM	BCl3 valve closed
8/2/2012	4:50:58 PM	PH3 valve closed
8/2/2012	4:50:58 PM	SiCl4 pre valve closed
8/2/2012	4:50:58 PM	SiCl4 post valve closed
8/2/2012	4:50:58 PM	Bypass valve closed
8/2/2012	4:50:58 PM	Bubbler valve closed
8/2/2012	4:50:58 PM	Helium valve opened
8/2/2012	4:50:58 PM	Main Vac valve opened
8/2/2012	4:50:58 PM	Helium MFC set to  20.000000
8/2/2012	4:50:58 PM	H2 MFC set to  0.000000
8/2/2012	4:50:58 PM	BCl3 MFC set to  0.000000
8/2/2012	4:50:58 PM	PH3 MFC set to  0.000000
8/2/2012	4:50:58 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:50:58 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:50:58 PM	Tube furnace set to 150
8/2/2012	4:52:58 PM	Helium valve closed
8/2/2012	4:52:58 PM	H2 valve closed
8/2/2012	4:52:58 PM	BCl3 valve closed
8/2/2012	4:52:58 PM	PH3 valve closed
8/2/2012	4:52:58 PM	SiCl4 pre valve closed
8/2/2012	4:52:58 PM	SiCl4 post valve closed
8/2/2012	4:52:58 PM	Bypass valve closed
8/2/2012	4:52:58 PM	Bubbler valve closed
8/2/2012	4:52:58 PM	Main Vac valve opened
8/2/2012	4:52:58 PM	Helium MFC set to  0.000000
8/2/2012	4:52:58 PM	H2 MFC set to  0.000000
8/2/2012	4:52:58 PM	BCl3 MFC set to  0.000000
8/2/2012	4:52:58 PM	PH3 MFC set to  0.000000
8/2/2012	4:52:58 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:52:58 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:52:58 PM	Tube furnace set to 150
8/2/2012	4:53:28 PM	H2 valve closed
8/2/2012	4:53:28 PM	BCl3 valve closed
8/2/2012	4:53:28 PM	PH3 valve closed
8/2/2012	4:53:28 PM	SiCl4 pre valve closed
8/2/2012	4:53:28 PM	SiCl4 post valve closed
8/2/2012	4:53:28 PM	Bypass valve closed
8/2/2012	4:53:28 PM	Bubbler valve closed
8/2/2012	4:53:28 PM	Helium valve opened
8/2/2012	4:53:28 PM	Main Vac valve opened
8/2/2012	4:53:28 PM	Helium MFC set to  20.000000
8/2/2012	4:53:28 PM	H2 MFC set to  0.000000
8/2/2012	4:53:28 PM	BCl3 MFC set to  0.000000
8/2/2012	4:53:28 PM	PH3 MFC set to  0.000000
8/2/2012	4:53:28 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:53:28 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:53:29 PM	Tube furnace set to 150
8/2/2012	4:53:59 PM	Helium valve closed
8/2/2012	4:53:59 PM	H2 valve closed
8/2/2012	4:53:59 PM	BCl3 valve closed
8/2/2012	4:53:59 PM	PH3 valve closed
8/2/2012	4:53:59 PM	SiCl4 pre valve closed
8/2/2012	4:53:59 PM	SiCl4 post valve closed
8/2/2012	4:53:59 PM	Bypass valve closed
8/2/2012	4:53:59 PM	Bubbler valve closed
8/2/2012	4:53:59 PM	Main Vac valve opened
8/2/2012	4:53:59 PM	Helium MFC set to  0.000000
8/2/2012	4:53:59 PM	H2 MFC set to  0.000000
8/2/2012	4:53:59 PM	BCl3 MFC set to  0.000000
8/2/2012	4:53:59 PM	PH3 MFC set to  0.000000
8/2/2012	4:53:59 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:53:59 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:53:59 PM	Tube furnace set to 150
8/2/2012	4:54:29 PM	H2 valve closed
8/2/2012	4:54:29 PM	BCl3 valve closed
8/2/2012	4:54:29 PM	PH3 valve closed
8/2/2012	4:54:29 PM	SiCl4 pre valve closed
8/2/2012	4:54:29 PM	SiCl4 post valve closed
8/2/2012	4:54:29 PM	Bypass valve closed
8/2/2012	4:54:29 PM	Bubbler valve closed
8/2/2012	4:54:29 PM	Helium valve opened
8/2/2012	4:54:29 PM	Main Vac valve opened
8/2/2012	4:54:29 PM	Helium MFC set to  20.000000
8/2/2012	4:54:29 PM	H2 MFC set to  0.000000
8/2/2012	4:54:29 PM	BCl3 MFC set to  0.000000
8/2/2012	4:54:29 PM	PH3 MFC set to  0.000000
8/2/2012	4:54:29 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:54:29 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:54:29 PM	Tube furnace set to 150
8/2/2012	4:56:29 PM	Helium valve closed
8/2/2012	4:56:29 PM	H2 valve closed
8/2/2012	4:56:29 PM	BCl3 valve closed
8/2/2012	4:56:29 PM	PH3 valve closed
8/2/2012	4:56:29 PM	SiCl4 pre valve closed
8/2/2012	4:56:29 PM	SiCl4 post valve closed
8/2/2012	4:56:29 PM	Bypass valve closed
8/2/2012	4:56:29 PM	Bubbler valve closed
8/2/2012	4:56:29 PM	Main Vac valve opened
8/2/2012	4:56:29 PM	Helium MFC set to  0.000000
8/2/2012	4:56:29 PM	H2 MFC set to  0.000000
8/2/2012	4:56:29 PM	BCl3 MFC set to  0.000000
8/2/2012	4:56:29 PM	PH3 MFC set to  0.000000
8/2/2012	4:56:29 PM	SiCl4 MFC set to  0.000000
8/2/2012	4:56:29 PM	Bypass solenoid MFC set to  0.000000
8/2/2012	4:56:29 PM	Tube furnace set to 150
8/2/2012	4:56:30 PM	Run finished at 4:56 PM
